Method for producing a transition edge sensor
AssigneeOxford Instruments Superconductivity Ltd.
InventorsDavid John Goldie, Erdan Gu
Life of this patent
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Abstract
A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.
Claims11
A method of producing a transition edge sensor, the method comprising:
- depositing a sensing material upon a substrate to form a sensing layer having a transition temperature;
- characterised by selecting a desired transition temperature of the sensing layer;
- and by controlling the temperature of the substrate for the deposition process in accordance with the selected transition temperature.
A method according to any of the preceding claims, wherein the substrate is silicon nitride.
A method according to any of the preceding claims, wherein the sensing material is deposited as a single layer.
Dependencies are inferred from the claim text.