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US 2002/0170679 A1Published application
Susceptor supporting construction
AssigneeNGK Insulators, Ltd.
InventorsKazuaki Yamaguchi, Yoshinobu Goto
Life of this patent
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AssigneeNGK Insulators, Ltd.
InventorsKazuaki Yamaguchi, Yoshinobu Goto
Estimating the term…
A susceptor supporting construction has a susceptor for heating a member to be processed and a supporting member, in which an inner space is arranged, connected to the susceptor. A chamber having an opening is connected to the supporting member, the opening of the chamber is communicated with the inner space of the supporting member, and the inner space of the supporting member is sealed in an airtight manner with respect to an inner space of the chamber. The supporting member further has a tubular main portion, a diameter extending portion arranged at an end portion thereof to which the susceptor is faced, and one or more continuous round portions arranged between the main portion and the diameter extending portion, when viewed by an outer profile of a longitudinal section of the supporting member.
A susceptor supporting construction having a susceptor for heating a member to be processed and a supporting member, in which an inner space is arranged, connected to the susceptor, wherein, a chamber having an opening is connected to the supporting member, the opening of the chamber is communicated with the inner space of the supporting member, and the inner space of the supporting member is sealed in an airtight manner with respect to an inner space of the chamber, comprising the supporting member further having a tubular main portion, a diameter extending portion arranged at an end portion thereof to which the susceptor is faced, and one or more continuous round portions arranged between the main portion and the diameter extending portion, when viewed by an outer profile of a longitudinal section of the supporting member.
Dependencies are inferred from the claim text.