RF power process apparatus and methods
OwnerSteven D. Tucker, Jason F. Elston +1inventors
InventorsSteven D. Tucker, Jason F. Elston, Russell F. Jewett
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Abstract
Described are methods and apparatus for coupling RF power. In one embodiment, the method includes the step of flowing an RF current through an RF induction coil having a sufficiently large surface area and a low profile that results in effective RF power coupling to the load. Preferably, the turns of the coil comprise sheets of metal and the coil turns are substantially parallel to each other. Another aspect of the present invention is an apparatus for carrying out processes that use RF power.
Claims23
An apparatus for inductively coupled RF power process operations, the apparatus comprising:
- a process chamber;
- an RF power source;
- and
- an RF power induction coil, the RF power induction coil having substantially non-coplanar coil turns, at least one of the coil turns comprising an electrically conductive sheet having a large surface area, the coil being connected with the RF power source so as to receive RF power, the large surface area being oriented substantially perpendicularly to magnetic field lines caused by RF current flow through the coil, the coil being disposed so as to couple RF power to the chamber for the process operations.
An apparatus for inductively coupling RF power, the apparatus comprising:
- an RF power source;
- and
- an RF power induction coil, the RF power induction coil having a plurality of coil turns, the coil turns comprising an electrically conductive sheet, the coil being substantially helical, the surface of the sheet being substantially perpendicular to the axis of the coil, the coil being connected with the RF power source so as to receive RF power.
An apparatus for inductively coupling RF power, the apparatus comprising:
- an RF power source;
- a substantially solid insulator;
- and
- an RF power induction coil, the RF power induction coil having about four coil turns, the coil turns comprising a sheet of electrical conductor so as to have a large surface area such that the ratio of the outer diameter of the coil turn to the thickness of the coil turn is greater than or equal to about 6:0.04, the insulator being sandwiched between the coil turns, the coil having a first end and a second end opposite the first end, the first end of the coil being attached to the RF power source so as to receive RF power, the second end of the coil being capable of connection to electrical ground, and the thickness of the coil being less than about 0.25 inch (about 6.3 mm).
An RF induction coil for transmitting RF power from an RF power source, the coil comprising:
- a plurality of coil turns, the coil turns comprising a sheet of electrical conductor, the coil turns having an inner diameter and an outer diameter, the coil turns being substantially non-coplanar, the surface of the sheet being substantially nonparallel to the axis of the coil.
A method of fabricating RF induction coils, the method comprising the steps of:
- 1. providing a substrate;
- 2. depositing an electrically conductive layer on the substrate;
- 3. defining a pattern in the conductive layer and forming a coil turn;
- 4. depositing an electrically insulating layer over the conductive layer;
- 5. depositing a subsequent electrically conductive layer on the insulating layer;
- 6. defining a pattern in the subsequent conductive layer and forming a subsequent coil turn substantially concentric with the previous coil turn;
- and
- 7. electrically connecting the coil turns.
A method of inductively coupling RF power, the method comprising the steps of:
- providing an RF power source;
- and
- applying RF power from the source to an RF power induction coil, the RF power induction coil having a plurality of coil turns, the coil turns comprising an electrically conductive sheet, the coil being substantially helical, and the surface of the sheet being substantially perpendicular to the axis of the coil.
Dependencies are inferred from the claim text.