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AssigneeLG Electronics Inc.
InventorsSam-Chul Ha, Young-Man Jeong, Seak-Je Jo, Dong-Sik Youn
Estimating the term…
A continuous processing apparatus by plasma polymerization having a plurality of chambers to perform a surface processing by plasma polymerization on the surface of a substance being moved into a chamber, includes at least one vertical chamber in which a substance is vertically moved and at least one electrode is included therein. Since the vertical chamber can be possibly formed solely or by plural ones, or can be formed along with the horizontal chamber, various forms of plasma polymerization processing system can be constructed. In addition, the plurality of chambers can be utilized for various functions and use such as the polymerization chamber, the post-processing chamber and pre-processing chamber according to purposes of surface processing.
A continuous processing apparatus by plasma polymerization having a plurality of chambers to perform a surface processing by plasma polymerization on the surface of a substance being moved into a chamber, comprises:
A continuous processing apparatus by plasma polymerization with a vertical chamber in which a plurality of chambers are provided to perform a surface processing by plasma polymerization on the surface of a substance being moved into a chamber, comprises:
A continuous processing apparatus by plasma polymerization with a vertical chamber including an unwinding chamber having an unwinding roll for unwinding a substance wound thereon, a winding chamber having a winding roll for winding a surface-processed substance, and a polymerization chamber in which the substance is surface-processed by plasma discharging after being conveyed from the unwinding chamber,
A continuous processing apparatus by plasma polymerization with a vertical chamber, comprises:
Dependencies are inferred from the claim text.