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AssigneeThe Fox Group, Inc.
InventorsYury Alexandrovich Vodakov, Sergei Yurievich Karpov, Yury Nikolaevich Makarov, Evgeny Nikolaevich Mokhov, Mark Grigorievich Ramm, Alexandr Dmitrievich Roenkov, Alexandr Solomonovich Segal
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A method and an apparatus for growing monocrystalline aluminum nitride are provided, the method and apparatus allowing high single crystal growth rates to be achieved. In one aspect, the seed crystal and the aluminum source are placed in a growth chamber such that the growth surface of the seed crystal is substantially parallel to the evaporating surface of the aluminum surface. In another aspect, the inner surfaces of the growth chamber are comprised of an alloy of tantalum and carbon. In another aspect, during crystal growth the aluminum source is kept at a temperature higher than the seed crystal in order to maintain an axial temperature gradient within the growth chamber. In another aspect, during crystal growth the nitrogen pressure within the growth chamber is at least equal to the pressure exerted by the aluminum-nitrogen vapor mixture. In another aspect, during crystal growth a stoichiometric ratio of aluminum and nitrogen atoms is maintained in the aluminum-nitrogen vapor mixture within the growth chamber.
A method of epitaxial growth of aluminum nitride single crystals out of a mixture of nitrogen and aluminum vapors comprising the placement in a growth chamber (3), opposite each other, of a substrate (4) and an aluminum source (5), heating and maintaining operating temperatures of the source (5) and the substrate (4), providing, the formation of aluminum vapors in the mixture and the growth of an aluminum nitride single crystal on the substrate (4), respectively, characterized in that the pressure of the mixture of nitrogen and aluminum vapors in the growth chamber (3) is maintained within an interval of 400 mbar from the lower limit equal to the pressure developed in a closed preliminary evacuated volume by the mixture of nitrogen and aluminum vapors formed by evaporating of aluminum nitride heated up to the temperature of the source.
A growth chamber (3) for epitaxial growth of monocrystalline aluminum nitride out of a mixture of nitrogen and aluminum vapors, adapted to enclose the source (5) of aluminum and the substrate (4) to heat and maintain temperatures of the source (5) and the substrate (4), providing the growth of aluminum nitride single crystals on the substrate (4), characterized in that the material of the surface of the growth chamber, being in contact with the source and the aluminum vapors is a solid solution of tantalum carbide in tantalum.
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