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AssigneeAdvanced Technology Materials, Inc.
InventorsBelynda G. Flippo, Keith Kaarup Doc, Robbert Vermeulen, Daniel O. Clark
Estimating the term…
A method and system for retrofitting an integrated scrubber to provide maximum oxygen content in a controlled decomposition oxidation (CDO) abatement process comprising a thermal/wet integrated scrubber, and a compressed air supply for supplying air to an oxygen separation device that separates the air into a nitrogen-enriched component and an oxygen-enriched component. The oxygen separation device comprises a module, such as a vessel containing ceramic-materials arranged in an adsorbent bed or coated on a substrate. The present invention uses a ceramic oxide material through which only oxygen can diffuse. The composition of the ceramic oxide adsorbent material is such that a significant number of oxygen vacancies exist in the material. By placing either a voltage potential or a pressure gradient across the membrane, oxygen is selectively diffused in and through the oxide material to separate the air supply into an oxygen component for introduction into the integrated scrubber.
An abatement system for pollutants in a gas stream comprising:
An abatement system for oxidative treatment of gaseous pollutant in a gas stream, the system comprising:
A method for retrofitting an abatement system for processing a gaseous waste stream to introduce an oxygen-enriched source therein, the method comprising:
A method for generating oxygen-enriched air for subsequent introduction into an integrated scrubber system which comprises a combustion chamber for abatement of gaseous waste products from a semiconductor process, the method comprising:
Dependencies are inferred from the claim text.