Chamber for a high vacuum system
OwnerBruse Lee, Ching Shun Fan +2inventors
InventorsBruse Lee, Ching Shun Fan, Thanku Shieh, Hsien Hsiang Lin
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Abstract
A chamber for a high vacuum system is provided. The chamber is tested by a leakage tester, and comprises a body and an intermediate unit. The body is provided with at least one port. The intermediate unit, disposed on the body, connects with the port in order to communicate with the leakage tester. When the chamber is to be tested by the leakage tester, it can be directly connected with the leakage tester through the intermediate unit. Leakage testing of the chamber is thus simplified and rendered considerably more efficient.
Claims4
A chamber for a high vacuum system, wherein the chamber is tested by a leakage tester, comprises:
- a body provided with at least one port;
- and
- an intermediate unit, disposed on the body, connecting with the port in order to communicate with the leakage tester.
Dependencies are inferred from the claim text.