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US 2002/0170175 A1Published application
Method for producing micromechanical structures
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Florian Plotz, Sven Michaelis, Michael Brauer
Life of this patent
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Abstract
A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.
Claims14
A method of producing a micromechanical structure, which comprises the steps of:
- joining a base body to a covering body along a common boundary surface to form a composite body having a cavity formed in the composite body along the common boundary surface;
- disposing the composite body with a surface of the base body on a support for a sawing of the covering body;
- forming an opening to the cavity by removing material in a region of one surface of the composite body;
- and
- disposing the composite body with a surface of the covering body on the support for a sawing of the base body.
2 more elements
Dependencies are inferred from the claim text.