Semiconductor test system monitor apparatus thereof
AssigneeAdvantest Corporation
InventorsAtsushi Sato, Masafumi Nakamura, Tsuyohiro Ihata
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Abstract
The present invention provides a semiconductor test system and a monitor apparatus for monitoring a test history such as numbers of operation of relays. The semiconductor test system tests a semiconductor device by controlling test circuits therein through a tester bus and monitors the test history. The test system includes a plurality of buffer circuits for receiving signal information from the tester bus and storing the signal information therein, and a computer for storing the signal information from the buffer circuits in a file and analyzing the signal information in the file.
Claims17
A semiconductor test system, comprising:
- a memory means for storing information concerning control signals;
- an analysis means for analyzing the information on the control signals read from the memory means;
- and
- a life-predicting means for predicting life spans of components of short life based on the analyzed information obtained by the analysis means.
A semiconductor test system, comprising:
- a memory means for storing information concerning control signals;
- and
- an analysis means for analyzing the information on the control signals read from the memory means;
- thereby monitoring a test history associated with the semiconductor test system.
A semiconductor test system, comprising:
- a memory means for storing information concerning control signals;
- a filter means for retrieving information in the control signals read from the memory means based on search data;
- an analysis means for analyzing the information in the signal retrieved by the filter means;
- and
- a life-predicting means for predicting life spans of components of short life based on the analyzed information obtained by the analysis means.
A semiconductor test system for testing a semiconductor device by controlling test circuits in the test system through a tester bus and for monitoring a test history thereof, comprising:
- a plurality of buffer circuits for receiving signal information from the tester bus and temporarily storing the signal information therein;
- and
- a computer for storing the signal information from the buffer circuits in a file and analyzing the signal information in the file.
A semiconductor test system for testing a semiconductor device by controlling test circuits in the test system through a tester bus and for monitoring a test history thereof, comprising:
- a first buffer for receiving signal information from the tester bus and temporarily storing the signal information therein;
- a second buffer for receiving signal information from the tester bus and temporarily storing the signal information therein;
- a first switch means for alternately providing the signal information from the tester bus to the first buffer or the second buffer;
- a second switch means for selecting the second buffer when said first switch connects to the first buffer and for selecting the first buffer when said first switch connects to the second buffer, and alternately outputting the signal information;
- and
- a computer for storing the signal information from the second switch means in a file and analyzing the signal information in the file.
A monitor apparatus for use with a semiconductor test system for testing a semiconductor device and monitoring a test history thereof, comprising:
- a buffer circuit for storing control signal information regarding controls in the semiconductor test system;
- and
- a computer for storing the signal information from the buffer circuit in a file and analyzing the signal information in the file.
A monitor apparatus for use with a semiconductor test system for testing a semiconductor device and monitoring a test history thereof, comprising:
- a plurality of buffer circuits connected to a tester bus which controls test circuits in the semiconductor test system for alternately storing control signal information on said tester bus;
- and
- a computer for alternately receiving the signal information from the buffer circuit and storing the signal information in a file and analyzing the signal information in the file.
A monitor apparatus for use with a semiconductor test system for testing a semiconductor device and monitoring a test history thereof, comprising:
- a first buffer connected to a tester bus of the semiconductor test system for receiving signal information from the tester bus and temporarily storing the signal information therein;
- a second buffer connected to a tester bus of the semiconductor test system for receiving signal information from the tester bus and temporarily storing the signal information therein;
- a first switch means for alternately providing the signal information from the tester bus to the first buffer or the second buffer;
- a second switch means for selecting the second buffer when said first switch connects to the first buffer and for selecting the first buffer when said first switch connects to the second buffer, and alternately outputting the signal information;
- and
- a computer for storing the signal information from the second switch means in a file and analyzing the signal information in the file.
A monitor apparatus for use with a semiconductor test system which tests a semiconductor device under test by controlling a plurality of relays therein, comprising:
- a means for storing a number of ON/OFF operations of the relays under dry condition wherein no electric current flows through contacts of the relays and a number of ON/OFF operations of the relays under wet condition wherein electric current flows through the contacts of the relays;
- and
- a means for analyzing a test history based on the number of ON/OFF operations stored in the storing means.
Dependencies are inferred from the claim text.