# US 2002/0164934 A1 · Sheet peripheral edge grinder

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- Number: US 2002/0164934 A1
- Document ID: US20020164934A1
- Status: Published application
- Kind: A1
- Application number: 10/110,858
- Filed: 2002-04-17
- Published: 2002-11-07
- Earliest claimed: 2000-08-18
- Assignees: Tokyo Seimitsu Co., Ltd.
- Inventors: Katsuo Honda
- Web page: https://patentgrep.com/patent/US20020164934A1

## CPC

- B24B 47/12: by mechanical gearing or electric power (B24B47/16 takes precedence)
- B24B 9/065: {of thin, brittle parts, e.g. semiconductors, wafers}
- B24B 41/04: Headstocks; Working-spindles; Features relating thereto
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

## Abstract

A polishing machine for polishing a periphery of a sheet of the present invention comprises a grinding shaft tilting mechanism (1) capable of changing a tilting angle of a rotary shaft of a grinding stone (3) with respect to a rotary shaft of the sheet (2) and also capable of changing its tilting direction. Accordingly, in a recess portion or a protrusion portion in the periphery, when the tilting direction is changed while the tilting angle is being maintained, chamfering (polishing) can be executed with high accuracy in the same manner as that of the outer circumferential portion of the sheet.

## Claims

### Claim 1

A polishing machine for polishing a periphery of a sheet in which the sheet having a recess portion or protrusion portion in the periphery is rotated, a rotating grinding stone is made to come into contact with the periphery of the sheet so as to polish the periphery and the recess portion or protrusion portion, the polishing machine comprising a grinding stone shaft tilting mechanism capable of changing a tilting angle of a rotary shaft of the grinding stone in the tangential direction of the periphery of the sheet and also capable of changing its tilting direction.

### Claim 2 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein the tilting angle of the grinding stone is adjusted by the grinding stone shaft tilting mechanism according to a necessary chamfering angle of the sheet.

### Claim 3 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein the tilting direction of the rotary shaft of the grinding stone is adjusted according to the rotary angle of the sheet when the recess portion or protrusion portion in the periphery of the sheet is polished.

### Claim 4 (depends on 2)

A polishing machine for polishing a periphery of a sheet according to claim 2, wherein the tilting direction of the rotary shaft of the grinding stone is adjusted according to the rotary angle of the sheet when the recess portion or protrusion portion in the periphery of the sheet is polished.

### Claim 5 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein polishing is conducted while the tilting angle of the grinding stone is being maintained at 0° by the grinding stone shaft tilting mechanism when a bottom portion of the recess portion of the sheet is polished.

### Claim 6 (depends on 2)

A polishing machine for polishing a periphery of a sheet according to claim 2, wherein polishing is conducted while the tilting angle of the grinding stone is being maintained at 0° by the grinding stone shaft tilting mechanism when a bottom portion of the recess portion of the sheet is polished.

### Claim 7 (depends on 3)

A polishing machine for polishing a periphery of a sheet according to claim 3, wherein polishing is conducted while the tilting angle of the grinding stone is being maintained at 0° by the grinding stone shaft tilting mechanism when a bottom portion of the recess portion of the sheet is polished.

### Claim 8 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein an oblique angle of the polishing face of the grinding stone is the same as the oblique angle of the oblique face of the grinding stone groove which is self-formed according to the tilting angle of the grinding stone having a groove.

### Claim 9 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein the degree of bonding of the grinding stone is lower than that of a metal bond.

### Claim 10 (depends on 1)

A polishing machine for polishing a periphery of a sheet according to claim 1, wherein the sheet is a semiconductor wafer and the recess portion is a notch portion or orientation-flat marking portion.