Electrostatic discharge protection for sensors
AssigneeSTMicroelectronics S.r.l.
InventorsArnaud Yves Lepert, Danielle A. Thomas
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Abstract
A structure and method is disclosed for dissipating electrostatic charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry, and a conductive layer and passivation layers disposed over the underlying dielectric layer wherein the conductive layer diffuses electrostatic charges at the surface of the integrated circuit.
Claims38
A method of forming an electrostatic discharge device comprising the steps of:
- forming a composite insulating layer between and over a plurality of conductive plates, wherein the insulating layer isolates the conductive plates and protects the conductive plates from damage, and wherein the insulating layer comprises a dielectric region underlying an electrostatic discharge region.
A method of forming an electrostatic discharge device comprising the steps of:
- forming a dielectric layer over a plurality of conductive plates isolating the conductive plates;
- and
- forming a conductive layer disposed over at least a portion of the dielectric layer and disposed over or adjacent to one or more conductive plates, wherein the conductive layer dissipates an electrostatic charge in a manner which prevents the electrostatic charge from reaching the plurality of conductive plates.
A portion of an integrated circuit, comprising:
- an insulating layer between and over a plurality of conductive plates, wherein the insulating layer isolates the conductive plates and protects the conductive plates from damage, and wherein the insulating layer comprises a conductive electrostatic discharge region.
A portion of an integrated circuit, comprising:
- a dielectric layer over a plurality of conductive plates isolating the conductive plates;
- and
- a conductive layer disposed over at least a portion of the dielectric layer and disposed over or adjacent to one or more conductive plates, wherein the conductive layer dissipates an electrostatic charge in a manner that prevents the electrostatic charge from reaching the plurality of conductive plates.
Dependencies are inferred from the claim text.