Fabrication of self-assembled monolayers
OwnerHitoshi Fukushima, Satoru Miyashita +3inventors
InventorsHitoshi Fukushima, Satoru Miyashita, Masaya Ishida, Andrew Holmes, Wilhelm Huck
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Abstract
A self-assembled monolayer (SAM) is fabricated using either a semi-fluorinated sulphur containing compound, or a sem-fluorinated silane derivative and compressed carbon dioxide (CO2) as the solvent medium. The temperature and/or pressure of the compressed CO2 may be varied during the fabrication process to improve the molecular packing density of the monolayer. By using compressed CO2 as the solvent medium, monolayers with good molecular packing density can be fabricated relatively quickly without the use of environmentally unfriendly solvents.
Claims30
A method of fabricating a self-assembled monolayer of a substance on a substrate comprising depositing the substance on the substrate using compressed carbon dioxide as the solvent medium for the substance.
A method as claimed in 17, wherein Si comprises a trialkoxy derivative.
A method as claimed in any one of the preceding claims, wherein the self-assembled monolayer has an ellipsometry thickness of about 30 Å and a water contact angle of about 110°.
Dependencies are inferred from the claim text.