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US 2002/0164145 A1Published application
Fiber optic wafer probe
AssigneeCascade Microtech, Inc.
InventorsPeter R. McCann, John T. Martin
Life of this patent
Estimating the term…
Abstract
A fibre optic wafer probe that includes a fibre optic cable for approaching a device under test.
Claims87
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said probe body being sized such that at least a major portion of said elongate optical fiber is maintained free from freely moving with respect to said probe body.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said probe body defining a first terminal portion proximate said tip having a first cross sectional area, a second terminal portion proximate the opposing end of said probe body from said tip having a second cross sectional area, and an intermediate portion located generally half way between said first terminal portion and said second terminal portion having a third cross sectional area,
- wherein said first cross sectional area is less than said second cross sectional area, and said third cross sectional area is less than said second cross sectional area.
2 more elements
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said probe body proximate said tip including an inner material closely surrounding said elongate optical fiber, said probe body proximate said tip including another layer surrounding said inner material, wherein said inner layer of material has a greater tendency to maintain its cross sectional area while being flexed up to approximately 90° than said another layer while being flexed, when said another layer is free from said inner layer of material.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said elongate optical fiber longitudinally adjustable with respect to said body.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said fiber optic probe including a support for selectively maintaining said optical fiber from freely moving longitudinally with respect to said probe body.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) a substantial portion of said probe body being readily bendable to adjust the angle of said probe tip with respect to the probe body.
1 more element
A method of testing a device under test comprising;
- (a) providing a probe body having a tip for selectively approaching said device under test;
- (b) extending an elongate optical fiber longitudinally along said body and extending beyond said tip;
- (c) selectively maintaining a major portion of said optical fiber from freely moving longitudinally with respect to said probe body;
- (d) longitudinally adjusting a major portion of said optical fiber toward said tip;
- and
- (e) selectively maintaining a major portion of said optical fiber from freely moving longitudinally with respect to said probe body after said longitudinally adjusting.
3 more elements
A method of adjusting a optoelectronic probing device comprising:
- (a) providing a probe body having a tip for selectively approaching a device under test;
- (b) extending an elongate optical fiber longitudinally along said body and extending beyond said tip;
- (c) engaging said probe body with a bending tool;
- (d) bending a portion of said probe body by cooperation of said probe body and said bending tool;
- and
- (e) disengaging said probe body from said bending tool.
3 more elements
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) a major portion of said probe body having a substantially constant vertical profile.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) said probe body defining a cavity therein through which said elongate fiber extends, wherein a major portion of said cavity closely surrounds said elongate optical fiber.
1 more element
A fiber optic probe comprising:
- (a) a probe body having a tip for selectively approaching a device under test;
- (b) an elongate optical fiber extending longitudinally along said body and extending beyond said tip;
- and
- (c) a structure that permits selective rotation of at least a portion of said optical fiber with respect to said probe body.
1 more element
Dependencies are inferred from the claim text.