Optical device and method therefor
AssigneeMotorola, Inc.
InventorsSebastian Csutak, Wei E. Wu
Life of this patent
Estimating the term…
Abstract
An optical device uses one or more doped pockets in one embodiment to increase the electric field at one or more edges of the light absorbing region to increase the efficiency of the optical device. In alternate embodiments, the optical device uses an overlying light-barrier layer to reduce optical absorption within the more highly doped region. Some embodiments use a comb-like structure for the optical device to reduce capacitance and create a planar CMOS compatible structure.
Claims32
An optical device formed in a semiconductor layer, the optical device comprising:
- a first doped region having an first conductivity type;
- a second doped region having a second conductivity type;
- a first light absorbing region interposed between the first and second doped regions;
- a third doped region having the first conductivity type;
- a second light absorbing region interposed between the second and third doped regions;
- a fourth doped region having the first conductivity type interposed between the first light absorbing region and the second doped region;
- and
- a fifth doped region having the first conductivity type interposed between the second light absorbing region and the second doped region.
An optical device formed in a semiconductor layer, the optical device comprising:
- a first doped region having an first conductivity type;
- a second doped region having a second conductivity type;
- a first light absorbing region interposed between the first and second doped regions;
- and
- a light-barrier layer overlying at least one of the first and second doped regions.
A method of forming an optical device comprising:
- providing a semiconductor substrate;
- forming a first doped region within the semiconductor substrate which has a first conductivity type;
- forming a second doped region within the semiconductor substrate which has a second conductivity type;
- providing a light absorbing region interposed between the first and second doped regions;
- and
- forming a light-barrier layer overlying at least one of the first and second doped regions.
Dependencies are inferred from the claim text.