Microoptoelectromechanical system (MOEMS) based laser

Abstract

A laser device includes a waveguide substrate having a plurality of folded waveguide paths, the folded waveguide paths having widths of no more than approximately 1 mm, the folded waveguide paths having a surface area to volume ratio of at least 4 mm−1. The laser can also include a re-entrant cavity adapted for surrounding the sides and bottom of the waveguide substrate and a plate layer having an electrode array formed from a plurality of conductive traces aligned with the waveguide paths. A method for forming a laser device includes the steps of providing a waveguide substrate and forming a folded waveguide structure from a plurality of intersecting folded waveguide paths in the waveguide substrate, the folded waveguide paths having widths of no more than 1 mm, the waveguide paths having a surface area to volume ratio of at least 4 mm−1.

Dependencies are inferred from the claim text.