Aberration correcting optical system
AssigneeCanon Kabushiki Kaisha
InventorTOSHIYUKI YOSHIHARA
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Abstract
An aberration changing optical system to be used with a projection optical system of a projection exposure apparatus, includes an optical element having at least one of a cylindrical surface and a toric surface and being rotatable about and tiltable to an optical axis of the optical system. In another form, the aberration changing optical system includes an optical element having different refracting powers in two orthogonal directions or having a refracting power only in one direction, the optical element being made rotatable about and tiltable to an optical axis of the optical system.
Claims20
An aberration changing optical system for changing an aberration, characterized by an optical element having at least one of a cylindrical surface and a toric surface and being rotatable about and tiltable to an optical axis of said optical system.
An aberration changing optical system for changing an aberration, characterized by an optical element having different refracting powers in two orthogonal directions or having a refractive power only in one direction, said optical element being rotatable about and tiltable to an optical axis of said optical system.
An optical system characterized by an optical element having at least one of a cylindrical surface and a toric surface and being inclined with respect to an optical axis.
An optical system characterized by an optical element having different refracting powers in two orthogonal directions or having a refracting power only in one direction, said optical element being inclined with respect to an optical axis.
Dependencies are inferred from the claim text.