A method of ablating material from a sample system comprising applying electromagnetic radiation pulse(s) from a 200-380 nm UV wavelength laser source of electromagnetic radiation to a sample system, wherein said pulse(s) are characterized by a combination of wavelength, degree of homogenization, fluence (energy density), pulse duration, pulse repetition rate, total number of pulse(s) applied to a location on a sample system, and diameter of electromagnetic radiation pulses at a location at which they impinge on a sample system;
- such that the results of ablation indicate at least one selection from the group consisting of:
- ablation was by an essentially pure optical mechanism as determined by any technique;
- ablation was by an essentially pure optical direct solid-to-gas phase transition mechanism as evidenced by ratios (ICP-OES), (ICPMS), (MIP-OES) or (MIP-MS) intensity of ablated high to low melting and/or boiling point elements or compounds remaining essentially constant over time;
- substantially uniform ablation depth occurred over the diameter of the ablated region;
- the ablation provides an ablated region in the sample system with an aspect ratio of diameter to depth of at least 0.8;
- and
- the electromagnetic radiation pulse(s) present with at least 85% homogenization as evidenced by measured radial energy uniformity.