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US 2002/0163709 A1Published application
Method and apparatus for detecting and latching the position of a MEMS moving member
OwnerAmir Raza Mirzainventor
Life of this patent
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Abstract
An apparatus for detecting the position of an optical element includes an actuator coupled to the optical element. A sensor coupled to the optical element senses the movement of the optical element. The sensor includes a moveable electrode coupled to the optical element for outputting a position detection signal.
Claims16
An apparatus for detecting the position of an optical element comprising:
- an optical element;
- an actuator coupled to said optical element for causing said optical element to move between at least a first position and a second position;
- a sensor coupled to set said optical element for detecting the motion of said optical element and outputting a position detection signal in response thereto, the sensor including a movable electrode coupled to said optical member.
An apparatus for latching a MEMS optical element comprising:
- an actuator;
- a base coupled to said actuator;
- said base being movable between a first position and a second position along a path of movement in response to activation and deactivation of said actuator;
- an extension extending from one side of said base in a direction substantially orthogonal to the path of motion;
- an optical element disposed on said base;
- a movable stop moving in a direction substantially orthogonal to said path of motion between a first position outside of the path of motion and at least a second position within the path of motion for engaging said extension when, said moveable stop is in said second position and said actuator being in a deactivated state.
3 more elements
An apparatus for preventing undesired movement of an optical MEMS element comprising:
- an actuator;
- a base coupled to said actuator and capable to being moved along a path of motion in response to the activation and deactivation of said actuator;
- said base including a first extension extending from said base in a direction substantially orthogonal to the direction of motion;
- and a second extension spaced from said first extension and extending from said base in a direction substantially orthogonal to said path of motion;
- an optical element disposed on said base;
- and
- a stationery stop disposed in said path of motion between said first extension and said second extension.
4 more elements
A method for detecting the position of a moveable optical element moved by an actuator comprising the steps of:
- coupling a moveable electrode to said optical element, so that the moveable electrode moves with the optical element along a path;
- providing a second electrode along the path;
- providing a third electrode along the path, the moveable electrode being disposed between the second and third electrodes;
- measuring the capacitance between the moveable electrode and the first electrode;
- measuring the capacitance between the moveable electrode and third electrode;
- and
- obtaining a difference between the two measured capacitances and producing a position detection signal in response thereto.
4 more elements
Dependencies are inferred from the claim text.