Surface shape measurement apparatus
AssigneeNidek Co., Ltd.
InventorSatoshi Imaizumi
Life of this patent
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Abstract
A surface shape measurement apparatus for measuring a shape of a surface of an object to be examined by a simple mechanism for rotating a reference grid. The apparatus comprises a stage on which the object is rest, a reference grid disposed in parallel to the stage, illumination means for illuminating the reference grid and projecting an grid pattern onto the object surface, photographing means for photographing the grid pattern projected onto the object surface through the reference grid and obtaining an image of moiré fringes, rotation means for rotating the reference grid about an axis normal to a grid surface of the grid plate, and analysis means for analyzing the shape of the object surface based on information about a rotation angle of the reference grid and intensity of the moiré fringes.
Claims6
A surface shape measurement apparatus for measuring a shape of a surface of an object to be examined, the apparatus comprising:
- (a) a stage on which the object is rest;
- (b) a reference grid disposed in parallel to the stage;
- (c) illumination means for illuminating the reference grid and projecting a grid pattern onto the surface of the object;
- (d) photographing means for photographing the grid pattern projected onto the object surface through the reference grid and obtaining an image of moiré fringes;
- (e) rotation means for rotating the reference grid about an axis normal to a grid surface of the reference grid;
- and
- (f) analysis means for analyzing the shape of the object surface based on information about a rotation angle of the reference grid and intensity of the moiré fringes.
A surface shape measurement apparatus for measuring a shape of a surface of an object to be examined, the apparatus comprising:
- (a) a stage on which the object is rest;
- (b) a grid plate having a reference grid and being disposed in parallel to the stage;
- (c) an illumination unit placed opposite to the stage with respect to the grid plate such that light obliquely enters the object surface through the reference grid;
- (d) a photographing unit placed opposite to the stage with respect to the grid plate such that the light from the object surface is received through the reference grid and that an image of moiré fringes is obtained;
- (e) a rotation unit which rotates the grid plate so as to rotate the reference grid about an axis normal to a grid surface of the reference grid;
- and
- (f) an analysis unit which analyzes the shape of the object surface based on information about a rotation angle of the reference grid and intensity of the moiré fringes.
Dependencies are inferred from the claim text.