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AssigneeASM Lithography B.V.
InventorsTheodorus H.J. Bisschops, Hermanus M.J.R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J.M. Renkens, Adrianus G. Bouwer
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An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.
A lithographic projection apparatus comprising:
Apparatus according to any one of the preceding claims wherein said beam extends generally vertically into said vacuum chamber and is shaped such that the net pressure force on said beam substantially counteracts the weight of said beam and the total mass it supports.
Apparatus according to any one of the preceding claims comprising two parallel laterally-spaced-apart beams for supporting said object or object table.
Apparatus according to any one of the preceding claims wherein the or each said beam comprises a hollow tube, e.g. formed of sintered Al2O3.
A device manufacturing method comprising the steps of:
A vacuum apparatus including a vacuum chamber accommodating a remotely manipulatable object, the vacuum apparatus being characterized in that it comprises:
Dependencies are inferred from the claim text.