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US 2002/0163398 A1Published application
Impedance matching device
AssigneeDAIHEN Corporation
InventorsKazuki Kondo, Daisuke Matsuno, Eiji Kaneko, Koji Itadani
Life of this patent
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AssigneeDAIHEN Corporation
InventorsKazuki Kondo, Daisuke Matsuno, Eiji Kaneko, Koji Itadani
Estimating the term…
In an impedance matching device having at least two stubs serially provided to a main coaxial tube so as to be separated from each other with a predetermined interval in a tube axial direction, each stub is composed of a variable capacity capacitor to be jointed to an inner conductor of the main coaxial tube, an electrically conductive capacitor cover to be jointed to an outer conductor of the main coaxial tube so as to cover a surrounding of the variable capacity capacitor, and a drive motor arranged on an outside of the capacitor cover so as to drive a movable side electrode of the variable capacity capacitor. The movable side electrode of the variable capacity capacitor is driven directly by the drive motor so that the impedance matching device is made to be compact and response of impedance matching to a fluctuation of a load impedance such as a behavior of a plasma load is improved, and the life is lengthened and degrees of freedom of installation is widened.
An impedance matching device, comprising at least two stubs provided serially on a main coaxial tube to be separated from each other with a predetermined interval in a tube axial direction, said main coaxial tube having an inner conductor and an outer conductor, wherein said each stub comprising:
Dependencies are inferred from the claim text.