Substrate-holding device for testing circuit arrangements on substrates
AssigneeSUSS MicroTec Testsystems (GmbH)
InventorsJorg Kiesewetter, Michael Teich, Stefan Schneidewind, Claus Dietrich
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Abstract
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which does not exhibit mechanical surface interfaces between the layers.
Claims10
A device for holding a substrate during testing of circuit arrangements on the substrate comprising a ceramic element having a substrate recieving surface and a thickness, the ceramic element having at least one conductive layer region formed within said thickness and the ceramic element having at least one insulative layer region formed within said thickness.
Dependencies are inferred from the claim text.