Scanning laser beam electrical circuit inspection system
AssigneeOrbotech Ltd.
InventorsEyal Harel, Yehoshua Dollberg, Ben-Zion Lavi
Life of this patent
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Abstract
An automated optical inspection system is operative to convey an electrical circuit to be inspected in a first direction. While the electrical circuit is being conveyed a laser beam scanner scans a laser beam in second direction, generally perpendicular to the first direction, and a fluorescence detector detects fluorescence produced by impingement of the laser beam on portions of the electrical circuit. The fluorescence detector receives fluorescence sequentially from portions of the electrical circuit illuminated by the laser beam as a result of both conveying of the electrical circuit and scanning of the laser beam in the second direction.
Claims52
An inspection system for electrical circuits comprising:
- a conveying subsystem for conveying an electrical circuit to be inspected in at least one direction;
- an inspection subsystem for performing optical inspection of said electrical circuit as it is being conveyed in said at least one direction, said inspection subsystem comprising:
- a laser beam generator generating a laser beam;
- a laser beam scanner operative to scan said laser beam in at least one second direction which is at least generally perpendicular to said first direction;
- and
- at least one fluorescence detector for detecting fluorescence produced by impingement of said laser beam on portions of said electrical circuit, said at least one fluorescence detector receiving fluorescence sequentially from portions of said electrical circuit illuminated by said laser beam as a result of both conveying of said electrical circuit in said at least one direction and scanning of said laser beam in said at least one second direction.
An inspection system for electrical circuits comprising:
- a conveying subsystem for conveying an electrical circuit to be
- inspected in at least one direction;
- an inspection subsystem for performing optical inspection of said electrical circuit as it is being conveyed in said at least one direction, said inspection subsystem comprising:
- a laser beam generator generating a laser beam;
- a laser beam scanner operative to scan said laser beam in a single pass across said entire electrical circuit in at least one second direction which is at least generally perpendicular to said first direction;
- a fluorescence detector for detecting fluorescence produced by impingement of said laser beam on portions of said electrical circuit.
An inspection system for electrical circuits comprising:
- a conveying subsystem for conveying an electrical circuit to be inspected in at least one direction;
- an inspection subsystem for performing optical inspection of said electrical circuit, said inspection subsystem comprising:
- a laser beam generator generating a laser beam;
- a laser beam scanner operative to scan said laser beam in at least one second direction which is at least generally perpendicular to said first direction, said laser beam scanner including a rotating polygon mirror and a laser beam deflector, receiving said laser beam from said laser beam scanner and deflecting said laser beam onto said electrical circuit as a function of the rotational position of the rotating polygon mirror;
- and
- a fluorescence detector for detecting fluorescence produced by impingement of said laser beam on portions of said electrical circuit.
An inspection system for electrical circuits comprising:
- a conveying subsystem for conveying an electrical circuit to be inspected in at least one direction, said electrical circuit including a non-metallic substrate;
- an inspection subsystem for performing optical inspection of said electrical circuit, said inspection subsystem comprising:
- a laser beam generator chosen from the group consisting of diode lasers and frequency transformed optically pumped semiconductor lasers;
- a laser beam scanner operative to scan said laser beam in at least one second direction which is at least generally perpendicular to said first direction;
- and
- a fluorescence detector for detecting fluorescence produced by impingement of said laser beam on portions of said electrical circuit.
A method for inspecting electrical circuits comprising:
- providing a plurality of scanning laser inspection means wherein at least two of said scanning laser inspection means employ laser beam generating means each emitting a laser beam having a different spectral characteristic;
- and
- supplying an electrical circuit to be inspected to one of said scanning laser inspection means as a function of a fluorescent response resulting from an interaction between a substrate portion of said electrical circuit to be inspected and the laser beam employed in said scanning laser inspection means and impinging thereon.
A method for inspecting electrical circuits comprising:
- providing scanning laser inspection means comprising at least two laser beam generating means each emitting a laser beam having a different spectral characteristic;
- and
- selecting one of said laser beam generating means for use in inspecting an electrical circuit to be inspected said laser beam generating means being selected as a function of a fluorescent response resulting from an interaction between a substrate portion of said electrical circuit and a laser beam emitted by said at least two laser beam generating means when impinging on said electrical circuit.
Dependencies are inferred from the claim text.