Device and method for inspection
AssigneeOHT Inc.
InventorsShogo Ishioka, Shuji Yamaoka
Life of this patent
Estimating the term…
Loading patent…
AssigneeOHT Inc.
InventorsShogo Ishioka, Shuji Yamaoka
Estimating the term…
The present invention provides an inspection apparatus and an inspection method, capable of, when supplying an inspection signal to a circuit wiring, eliminating any need for a pin to be brought into contact with the circuit wiring and detecting any defects including an invisible microscopic defect. An inspection apparatus A for inspecting a circuit wiring of a circuit board 100 comprises a conductive member 1 adapted to be disposed on the side of one of surfaces of the circuit board 100 and to be supplied with an inspection signal, a signal source 2 for supplying the inspection signal to the conductive member 1, a sensor unit 3 including a plurality of cells 3a to be disposed the opposed to the conductive member 1 on the side of the other surface of the circuit board 100, and a computer 5 for acquiring each signal appearing at the cells 3a in response to the inspection signal supplied to the conductive member 1.
An inspection apparatus for inspecting a circuit wiring of a circuit board, said inspection apparatus comprising:
An inspection method for inspecting a circuit wiring of a circuit board, said inspection method comprising the steps of:
An inspection apparatus for inspecting a circuit wiring of a multilayer circuit board having an overall electrode layer, said inspection apparatus comprising:
An inspection method for inspecting a circuit wiring of a multilayer circuit board having an overall electrode, said inspection method comprising the steps of:
An inspection apparatus for inspecting a circuit wiring of a circuit board, said inspection apparatus comprising:
An inspection method for inspecting a circuit wiring of a circuit board, said inspection method comprising the steps of:
An inspection method for inspecting a circuit wiring of a circuit board, said inspection method comprising the steps of:
An inspection apparatus for inspecting a circuit wiring of a circuit board, said inspection apparatus comprising:
Dependencies are inferred from the claim text.