Method and device for adjusting at least one light beam in an optical system
AssigneeLeica Microsystems CMS GmbH
InventorsHolger Birk, Johann Engelhardt
Life of this patent
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Abstract
A device (70) is disclosed for adjusting a light beam (1) in an optical system (100), whereby the optical system (100) defines an optical axis (60). The device (70) for adjusting comprises means for coupling-in (3) of the light beam into a housing part (80) of the device (70). The means for coupling-in (3) determines a coupling-in point (3a) and a coupled in light beam (9). At a least first and a second photo detector (10, 22) are arranged in different in distances to the coupling-in point (3a). In the coupled in light beam (9) at least one beam splitter (36) is provided, which directs the coupled in light beam (9) on at least one of the photo detectors (10, 22).
Claims21
Method for adjusting of at least one light beam in an optical system, comprising the following steps:
- coupling-in a light beam of the optical system at a coupling-in point into a device for adjusting the light beam and thereby generating a coupled in light beam in the device;
- directing the coupled in light beam to at least two photo detectors wherein each of the photo detectors is spaced differently from the coupling-in point of the coupled in light beam;
- determining the deviation of the coupled in light beam from the nominal position out of the electrical signals of the photo detectors;
- and
- adjusting of at least one optical element of the optical system, for bringing the coupled in light beam into a nominal position.
A device for adjusting a light beam in an optical system which defines an optical axis, comprising:
- means for coupling-in the light beam into a housing part of the device;
- a coupling-in point and a coupled in light beam being defined by the means for coupling-in;
- at least a first and a second photo detector being provided in different distances from the coupling-in point;
- and
- at least one beam splitter being arranged in the coupled in light beam which directs the coupled in light beam to the at least one photo detector.
Dependencies are inferred from the claim text.