High temperature EUV source nozzle

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end, and a channel therebetween, said source end receiving a target material and said exit end emitting a spray of the target material, the exit end of the nozzle including a contoured collimator portion that collimates the target material as it exits the nozzle;
• and
• a target material delivery tube extending through the channel, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the exit end of the nozzle, said second end including an expansion aperture, said first end receiving the target material and said second end emitting the target material through the expansion aperture into the exit end of the nozzle.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end, and a channel therebetween, said source end receiving a target material and said exit end emitting a spray of the target material, the exit end of the nozzle including a contoured collimator portion that collimates the target material as it exits the nozzle;
• and
• a target material delivery tube extending through the channel, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the exit end of the nozzle abutting against a shoulder formed between the collimator portion and a wider portion of the channel, said second end including an expansion aperture, said first end receiving the target material and said second end emitting the target material through the expansion aperture into the exit end of the nozzle.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end, and a channel therebetween, said source end receiving a target material and said exit end emitting a spray of the target material;
• and
• a target material delivery tube extending through the channel, said delivery tube being made of a material selected from the group consist of a low thermal conductivity material, graphite, and a refractory material.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end, and a channel therebetween, said source end receiving a liquid target material and said exit end emitting a spray of solid particles target material;
• and
• a target material delivery tube extending through the channel, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the exit end of the nozzle, said second end including an expansion aperture, said first end receiving the target material and said second end emitting the target material through the expansion aperture into the exit end of the nozzle.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end, and a channel therebetween, said source end receiving a liquid target material and said exit end emitting a spray of liquid droplet target material;
• and
• a target material delivery tube extending through the channel, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the exit end of the nozzle, said second end including an expansion aperture, said first end receiving the target material and said second end emitting the target material through the expansion aperture into the exit end of the nozzle.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end and a bore extending therebetween, said exit end having a contoured collimator portion, said source end receiving a liquid target material and said exit end emitting a spray of the liquid target material as a spray of liquid droplets;
• and
• a target material delivery tube extending through the bore so that a gap is provided between an inner surface of the nozzle body within the bore and an outer surface of the delivery tube, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the contoured collimator portion, said second end including an expansion aperture having a diameter less than the diameter of the collimator portion, said first end receiving the liquid target material and said expansion aperture emitting said target material into the collimator portion.

A nozzle for a laser-plasma extreme ultraviolet (EUV) radiation source, said nozzle comprising:

• a nozzle body having a source end, an exit end and a bore extending therebetween, said exit end having a contoured collimator portion, said source end receiving a liquid target material and said exit end emitting a spray of the liquid target material as a spray of liquid droplets;
• and
• a target material delivery tube extending through the bore so that a gap is provided between an inner surface of the nozzle body within the bore and an outer surface of the delivery tube, said delivery tube being made of a material selected from the group consisting of a low thermal conductivity material, stainless steel, graphite, and a refractory material, said delivery tube including a first end positioned proximate the source end of the nozzle and a second end positioned proximate the contoured collimator portion, said second end including an expansion aperture having a diameter less than the diameter of the collimator portion, said first end receiving the liquid target material and said expansion aperture emitting said target material into the collimator portion.

The nozzle according to claim 12 wherein the second end of the delivery tube abuts against a shoulder formed between the collimator portion and a wider portion of the channel.