US 2002/0162961 A1 · Sample mount for a scanning electron microscope

Abstract

A sample mount and method is disclosed for securing a semiconductor wafer sample to a generic base of a scanning electron microscope. The mount has two opposing clamp members that move relative to one another in response to rotational input to a lead screw. By placing a sample between the clamp members and rotating the lead screw, the samples may be clamped for inspection. When inspection is complete, the lead screw may be rotated in the opposite direction to release the clamping hold on the sample. The clamp members are adjustable to hold varying thicknesses and numbers of specimens making up the sample. In one embodiment, both clamp members move symmetrically from a common origin. In yet another embodiment, one clamp member is fixed relative to the mount and the other clamp member moves relative thereto.

Claims45

Dependent claims

An electron microscope comprising:

an electron beam source;
a vacuum chamber coupled to the electron beam source;
a base within the vacuum chamber;
and
a sample mount removably coupled to the base, the sample mount further comprising:
a first clamp member;
a second opposing clamp member, the clamp members being capable of securing a sample therebetween;
and
a lead screw operatively connected to both clamp members, whereby rotation of the lead screw varies the distance between the clamp members.

6 more elements

An electron microscope comprising:

an electron beam source;
a vacuum chamber coupled to the electron beam source;
a base within the vacuum chamber;
and
a sample mount removably coupled to the base,
the sample mount for retaining a sample for viewing with an electron microscope further comprising:
a retaining assembly comprising:
a plate having a first side and a second side wherein the first side comprises a pair of opposing tabs extending away from the first side and each tab has a centrally located first convex radius, the tabs being spaced apart by a tab separation;
and
a clamp body having a first side and a second side, the first side of the clamp body being removably attached to the first side of the plate, wherein the first side of the clamp body defines a pair of opposing recesses for receiving the tabs, each recess having a second centrally located convex radius substantially equal in size to the first convex radius such that when the plate is attached to the clamp body, the interrelation of the first and second convex radii define a pair of opposing cylindrical openings, the openings having a retaining diameter, and wherein the clamp body has a centrally located slot therein extending generally between the opposing recesses, the slot having a slot width;
a first clamp member operatively connected to the retaining assembly;
a second opposing clamp member operatively connected to the retaining assembly, the clamp members being capable of securing the sample therebetween, wherein the clamp members have a first portion and a second portion, the second portion having a width slightly less than the slot width such that the second portion of each clamp member nests within the slot of the clamp body, wherein the second portion of the first clamp member has a first threaded opening therein, said first threaded opening having a right-handed thread, and the second portion of the second clamp member has a second threaded opening therein, said second threaded opening having a left-handed thread;
and
a lead screw secured to the retaining assembly and threadably coupled to the first and second threaded openings.

11 more elements

An electron microscope comprising:

an electron beam source;
a vacuum chamber coupled to the electron beam source;
a base within the vacuum chamber;
and
a sample mount removably coupled to the base,
the sample mount for use with an electron microscope comprising:
a retaining assembly comprising:
a plate having a first side and a second side wherein the first side comprises a pair of opposing tabs extending away from the first side and each tab has a centrally located first convex radius, the tabs being spaced apart by a tab separation;
and
a clamp body having a first side and a second side, the first side of the clamp body being removably attached to the first side of the plate and the second side of the clamp body defining a fixed clamp face, wherein the first side of the clamp body defines a pair of opposing recesses for receiving the tabs, each recess having a second centrally located convex radius substantially equal in size to the first convex radius such that when the plate is attached to the clamp body, the interrelation of the first and second convex radii define a pair of opposing cylindrical openings, the openings having a retaining diameter, and wherein the clamp body has a centrally located slot therein extending generally between the opposing recesses, the slot having a slot width;
a clamp member operatively connected to the retaining assembly wherein the clamp member has a first portion substantially identical in size and in opposing relation to the clamp face, and a second portion, the second portion having a width slightly less than the slot width such that the second portion of the clamp member nests within the slot of the clamp body and wherein the second portion of the clamp member has a threaded opening therein;
and
a lead screw secured to the retaining assembly and operatively connected to the clamp member.

10 more elements

Dependencies are inferred from the claim text.

Sample mount for a scanning electron microscope

Life of this patent

Sample mount for a scanning electron microscope

Life of this patent

Abstract

Claims45