Control system for ablating high-density array of vias or indentation in surface of object

A laser beam delivery system for ablating a desired array of features in an object to be processed, the laser beam delivery system comprising:

• a laser for generating and outputting a coherent laser beam;
• a shaping apparatus for receiving the coherent laser beam output by the laser and for shaping the laser beam into a plurality of separate laser beams;
• first and second repeat positioners for redirecting a path of the plurality of separate laser beams;
• a converging mechanism for redirecting the plurality of separate laser beams through a clear aperture of a reflective mirror of the first repeat positioner;
• a focusing member for receiving the redirected plurality of laser beams from the first and second repeat positioners and focusing each of the plurality of laser beams at a desired one of a plurality of holographic imaging segments forming a holographic imaging lens;
• and each one of the holographic imaging segments, comprising the holographic imaging lens, forming a desired formation in a surface of the object to be processed.