Process for fabricating a component, such as a capacitor in an integrated circuit, and integrated-circuit component
AssigneeSTMicroelectronics S.r.l.
InventorsPascale Mazoyer, Christian Caillat
Life of this patent
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Abstract
Process for fabricating a component, such as a capacitor in an integrated circuit, and integrated component, in which process and component a first electrode is in the form of a cup; a layer made of a dielectric covers at least the wall of the first electrode; a second electrode fills the cup; a first electrical connection via lies above the second electrode; and a second electrical connection via lies laterally with respect to and at a predetermined distance from the first electrode and is connected to the first electrode.
Claims23
A method for fabricating a component in an integrated circuit, above a surface onto which first and second primary electrical connection vias open out, the vias being spaced apart and connected to each other below the surface and at a predetermined distance from the surface, the method comprising:
- depositing a first layer made of an electrically non-conducting material on a surface;
- forming a main hole in this first layer above a first connection via;
- depositing a second layer made of an electrically conducting material, covering one or more walls of the main hole;
- removing the second layer, leaving the electrically conducting material only in the main hole so as to constitute a first electrode in a form of a cup in this main hole;
- forming a dielectric at least on an inner surface of the cup;
- depositing a third layer of a electrically conducting material, filling the cup;
- removing the third layer, leaving the electrically conducting material in the cup so as to constitute a second electrode separated from the first electrode by the dielectric;
- depositing a fourth layer made of an electrically non-conducting material;
- forming a first secondary hole passing through the fourth layer and reaching a top surface of the second electrode and a second secondary hole passing through the fourth layer and the first layer, at a predetermined distance from the main hole, and reaching a top surface of the second via;
- and
- filling the first secondary hole and the second secondary hole with an electrically conducting material so as to form connection vias for the first electrode and second electrode.
An integrated circuit component comprising:
- a first electrode in a form of a cup;
- a dielectric layer covering at least a wall of a first electrode;
- a second electrode filling the cup;
- a first electrical connection via extending above a second electrode;
- and
- a second electrical connection via lying laterally from the first electrode and at a predetermined distance from the first electrode and connected thereto.
Dependencies are inferred from the claim text.