Method and apparatus for cleaning treatment
AssigneeTokyo Electron Limited
InventorsFumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi
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Abstract
An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.
Claims24
A method for a cleaning treatment, comprising the steps of:
- recovering a cleaning liquid after the cleaning liquid is supplied to clean an object treated;
- storing the cleaning liquid after separating and removing gas from the recovered liquid;
- and
- using the stored cleaning liquid for cleaning a object treated.
An apparatus for a cleaning treatment, comprising:
- first supply means for supplying a cleaning liquid to an object treated;
- a recovering pipe for recovering a used cleaning liquid used for the object treated;
- gas/liquid separation means for separating gas from the recovered liquid for removal;
- a cleaning liquid storing section for storing the cleaning liquid separated by the gas/liquid separation means;
- and
- second cleaning liquid supply means for supplying the cleaning liquid in the cleaning liquid storing section to an object to be cleaned.
An apparatus for a treatment, comprising:
- a vessel for recovering a treatment liquid flowing out or flying out when the object is treated;
- cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel;
- and
- a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying it to the cleaning means.
An apparatus for a treatment, wherein a vessel for recovering a treatment liquid flowing out or flying out when an object is treated and the inner wall surface of the vessel has an ethylene fluoride based resin layer formed on the surface.
An apparatus for a cleaning treatment of a cup in a coating mechanism comprising:
- a rotary cup with a cover which is rotatable, and which encloses a holding means for holding an object treated and the side and the lower portions of the object treated;
- a stationary cup which encloses the side and lower portions of the covered rotary cup;
- and a rectifying plate covering the object treated at a position thereabove, which is mounted inside the covered rotary cup, said apparatus comprising:
- a first nozzle for supplying a cleaning liquid on the rectifying plate by way of a supply hole bored in the middle of the cover of the covered rotary cup;
- and a second nozzle, which is located under the holding means, for supplying the cleaning liquid toward the lower surface of a peripheral portion of the rectifying plate, the inner side surface of the covered rotary cup and the bottom surface of a stationary cup.
A method for a cleaning treatment of a cup in a coating mechanism, comprising:
- a rotary cup with a cover which is rotatable, and which encloses a holding means for holding an object treated and the side and lower portions of the object treated;
- a stationary cup which encloses the side and lower portions of the covered rotary cup;
- and a rectifying plate covering the object treated at a position thereabove, comprising the steps of:
- supplying a cleaning liquid through the middle of the cover of the covered rotary cup toward the rectifying plate while rotating the covered rotary cup to supply the cleaning liquid to the lower surface of the cover with the help of an centrifugal force;
- and at the same time supplying the cleaning liquid toward a lower surface of the outer periphery of the rectifying plate, the inner side surface of the covered rotary cup and the bottom surface of the stationary cup.
Dependencies are inferred from the claim text.