Method for placing orders for masks used to fabricate semiconductor devices
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsSatoshi Aoyama, Yuko Kikuta
Life of this patent
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Abstract
A semiconductor device manufacture provides beforehand to a mask maker a plurality of specifications of masks which are related to a grade of the mask. The mask specifications are stored in a storage device of the mask maker. Upon placing an order for a specific mask, the semiconductor device manufacturer, sends to the mask maker a name of the specific mask and a symbol indicative of a grade of the specific mask (or a name of a mask including a grade symbol) by way of the Internet, and transmits to the mask maker drawing data and layout data by a network.
Claims2
A method for placing orders with a mask maker for masks used by a semiconductor device manufacturer to fabricate a semiconductor device, the method comprising the steps of:
- storing a plurality of specifications of masks in a storage device of the mask maker, each mask specification being related to a grade of the mask;
- transmitting, from the semiconductor device manufacturer to the mask maker, a name of a mask on order and a symbol indicative of a grade of the mask by way of the Internet, and drawing data and layout data by a network, thereby placing an order for a specific mask.
A method for placing orders with a mask maker for masks used by a semiconductor device manufacturer to fabricate a semiconductor device, the method comprising the steps of:
- storing a plurality of specifications of masks in a storage device of the mask maker, each mask specification being related to a grade of the mask;
- transmitting, from the semiconductor device manufacturer to the mask maker, a name of a mask on order including a symbol indicative of a grade of the mask by way of the Internet, and drawing data and layout data by a network, thereby placing an order for a specific mask.
Dependencies are inferred from the claim text.