Method and device for treating and/or coating a surface of an object
AssigneeRWE Solar Gmbh
InventorsThomas Kunz, Hilmar Von Campe
Life of this patent
Estimating the term…
Abstract
Method for treating and/or coating a surface of an object, especially for coating a surface of a substrate such as a semiconductor component or solar cell, in which the surface is supplied with a gas that contains particles that will interact and/or react with the surface, forming a coating thereon. The surface of the object is oriented at an angle α from the vertical, and the gas is directed toward the surface such that it flows along the object by force of convection, starting from the base area of the surface of the object.
Claims37
Method for treating and/or coating a surface of an object, especially for coating a surface of a substrate, such as a semiconductor component or solar cell, wherein the surface is supplied with a gas that contains particles that will interact and/or react with the surface, forming a coating thereon, characterized in that the surface of the object is oriented at an angle α from vertical, and in that the gas is directed toward the surface such that it flows along the object by force of convection, starting from the base area of the surface of the object.
Device for coating and/or treating a surface (28) of an object such as a substrate (44) by supplying said surface with a gas containing particles necessary for the coating or treatment, comprising a chamber (12) that is delimited by a top panel (26), a base panel (24), side panels, the surface to be coated or treated, and a longitudinal boundary panel (30) that extends parallel or essentially parallel to said surface, and that is equipped with a gas intake and outlet port (32, 34), along with at least one heat source (52, 54) for heating the surface, characterized in that the surface (28) of the object forms the boundary panel of the chamber (12) and is tilted from vertical by an angle α, wherein 0°≦α<90°, in that the gas intake and outlet ports (32, 34) are positioned at the top of the chamber (12), and in that the gas can be directed along the surface (28) as it flows through the chamber, by force of convection.
Dependencies are inferred from the claim text.