Magnetoelectric transducer and method for producing the same
AssigneeAsahi Kasei Electronics Co., Ltd.
InventorToshiaki Fukunaka
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Abstract
The present invention provides a thin magnetoelectric transducer which has a projected size substantially equal to that of a pellet and which can be subjected to an inspection test nondestructively. The magnetoelectric transducer has a semiconductor device provided on the upper surface of a projecting portion of a projecting nonmagnetic insulating substrate 9 and comprising a magnetosensitive section 3 and inner electrodes 2 made of metal. A conductive resin layer 4 is formed on the internal electrodes 2 and on part of the side surfaces of the projecting portion. A strain buffering layer 5 is formed at least on the magnetosensitive section 3. Furthermore, at least the strain buffering layer 5 on the magnetosensitive section 3 is coated with a protective layer 6.
Claims25
A magnetoelectric transducer characterized in that the transducer comprises a magnetosensitive section and internal electrodes formed on an upper surface of insulating substrate having conductive layers formed on side surfaces thereof, that an insulating portion and each of said conductive layers are formed of a sintered compact, that the sintered compact of said conductive layer is mainly included of metal of a high melting point of 1,600° C. or higher and ceramic powders, and that the sintered compact of said conductive layer contains 10% or more and 90% or less of the high-melting-point metal.
A method for producing a magnetoelectric transducer, characterized by comprising the steps of:
- forming a thin film that senses magnetism, on a surface of an insulating substrate via an insulating layer, the substrate having conductive layers formed therein and mainly included of a high-melting-point metal layer and ceramic powders in a thickness direction of the substrate, a sintered compact of each of the conductive layers containing 10% or more and 90% or less of the high-melting-point metal;
- forming a large number of magnetosensitive sections and internal electrodes of metal on the thin film in a pattern of elements to collectively form a large number of magnetoelectric transducers;
- cutting the insulating layer on said conductive layer of said substrate;
- electrically connecting the internal electrodes and conductive layers of each of said magnetoelectric transducers together;
- forming a protective layer at least on said magnetosensitive section;
- and
- cutting a central portion of each of the conductive layers of said substrate to individualize a large number of magnetoelectric transducers.
A method for producing a magnetoelectric transducer, characterized by comprising the steps of:
- forming a thin film that senses magnetism, on a surface of an insulating substrate via an insulating layer, the substrate having a conductive layer formed therein and mainly included of a high-melting-point metal layer and ceramic powders in a thickness direction of the substrate, a sintered compact of each of the conductive layers containing 10% or more and 90% or less of the high-melting-point metal;
- forming a large number of magnetosensitive sections and internal electrodes of metal on the thin film in a pattern of elements to collectively form a large number of magnetoelectric transducers;
- etching the insulating layer on said conductive layers of said substrate;
- electrically connecting the internal electrodes and conductive layers of each of said magnetoelectric transducers together;
- forming a protective layer at least on the magnetosensitive section;
- and
- cutting a central portion of each of the conductive layers of said substrate to individualize a large number of magnetoelectric transducers.
A method for producing a magnetoelectric transducer, characterized by comprising the steps of:
- forming an insulating layer on that part of a surface of an insulating substrate which is different from surfaces of conductive layers formed in the substrate and mainly included of a high-melting-point metal layer and ceramic powders in a thickness direction of the substrate, a sintered compact of each of the conductive layers containing 10% or more and 90% or less of the high-melting-point metal;
- forming a thin film that senses magnetism, on the insulating layer;
- forming a large number of magnetosensitive sections and internal electrodes of metal on the thin film in a pattern of final elements to collectively form a large number of magnetoelectric transducers;
- electrically connecting the internal electrodes and conductive layers of each of said magnetoelectric transducers together;
- forming a protective layer at least on said magnetosensitive section;
- and cutting a central portion of each of the conductive layers of said substrate to individualize a large number of magnetoelectric transducers.
Dependencies are inferred from the claim text.