Method for the processing of ultra-thin polymeric films
OwnerPer-Erik Nordal, Nicklas Johanssoninventors
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Abstract
In a method for preparing ultra-thin films of carbon-containing materials, particularly thin films of polymer materials. Films with a thickness of 0.5 μm or less are formed by deposition of the materials from a liquid phase onto a solid surface. The deposition takes place in an enclosure where the materials also are subjected to a post-deposition processing. The total humidity content in the enclosure shall be maintained at a level corresponding to a relative humidity of less than 50% in a volume of air equal to the volume of enclosure by excluding and/or removing water arid water vapor from the materials and/or the atmosphere in the enclosure.
Claims10
A method for preparing ultra-thin films of carbon-containing materials, particularly thin films of polymer materials, wherein the films have a thickness of 0.5 μm or less, wherein the films are formed by a depositing of the materials from a liquid phase onto a solid surface, wherein the liquid phase is formed by the material in the molten state or dissolved in a solvent, wherein the deposition takes place in an enclosure, the enclosure particularly being a clean room or a closed cubicle in a manufacturing installation, wherein the materials are capable of exhibiting ferroelectric and/or electret properties upon a suitable post-deposition processing, and wherein the method is characterized by maintaining a total humidity content in the enclosure corresponding to a relative humidity of less than 50% in a volume of air equal to the volume of the enclosure and the air being at the pressure of one atmosphere by excluding and/or removing water and water vapour from at least one of the following.
Dependencies are inferred from the claim text.