X-ray optical system
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorThomas Holz
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Abstract
The invention relates to an X-ray optics arrangement having an X-ray source, one element focussing X-rays and one element reflecting X-rays for the generation of a parallel X-radiation having a small beam cross section of high photon flux density. To solve this problem the X-radiation of the X-ray source is directed with the focussing element upon the convex, parabolic and reflecting surface of the reflecting element, and allowed to be advantageously employed in the X-ray analysis, e.g. with the X-ray diffraction measurement, reflectometry and/or fluoro-chemical analysis.
Claims10
An X-ray optics arrangement comprising an X-ray source, one element focussing X-rays and one element reflecting X-rays for the generation of a parallel X-radiation having a small beam cross section of high photon flux density, characterized in that said X-radiation of said X-ray source (1) is directed with said focussing element (2) upon the convex, parabolic and reflecting surface of the reflecting element (3).
Dependencies are inferred from the claim text.