Laser ventilation system
AssigneeLambda Physik AG
InventorsKay Zimmerman, Ulrich Rebhan
Life of this patent
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Abstract
A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.
Claims22
A ventilation system for a laser device, comprising:
- a housing of the laser system which encloses a plurality of compartments and includes at least one air inlet;
- an exhaust channel defined within the housing for receiving exhaust from the plurality of compartments;
- a plurality of intake ports each of which is positioned downstream of at least one compartment and upstream of the exhaust channel;
- one or more blowers for forcing exhaust to flow from the plurality of compartments to the exhaust channel;
- and
- an exhaust port for expelling exhaust from the exhaust channel.
A ventilation system for a laser device, comprising:
- a housing of the laser system which encloses a plurality of compartments and includes at least one air inlet;
- an exhaust channel defined within the housing for receiving exhaust from the plurality of compartments;
- a plurality of intake ports each of which is positioned downstream of at least one compartment and upstream of the exhaust channel;
- a single blower for forcing exhaust to flow from the plurality of compartments to the exhaust channel;
- and
- an exhaust port for expelling exhaust from the exhaust channel.
Dependencies are inferred from the claim text.