Apparatus for optical beam shaping and diffusing and associated methods
AssigneeASML US, Inc.
InventorMatthew E. Hansen
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AssigneeASML US, Inc.
InventorMatthew E. Hansen
Estimating the term…
This invention relates to an apparatus for optical beam shaping and diffusing, a method for making the apparatus, and a method for using the apparatus. The apparatus comprises a crystalline material object shaped to fit within an optical train and with a pattern of surface texture along an optical path. Surface removal processes are applied to a portion of a surface of an object made of a crystalline material to form a surface texture pattern at that portion of the surface of the object. The surface texture pattern depends upon: (1) the identity of the crystalline material and (2) the orientation of crystal lattice axes within the object with respect to the portion of the surface of the object where the pattern of surface texture is to be formed. Processes for making the apparatus include, but are not limited to, mechanical grinding, ablating, chemical etching, plasma etching, ion milling, and combinations thereof. The arrangement of the pattern of surface texture can be refined by coupling lithographic patterning methods with any of the surface removal processes. The apparatus can be used to change one or more of: (1) a shape, (2) an orientation, (3) an aspect ratio, (4) an angular pupil distribution, and (5) an intensity profile of a cross section of an optical beam.
An apparatus for optical beam shaping and diffusing, comprising an object shaped to fit within an optical train, wherein said object is made of a crystalline material, wherein a portion of a surface of said object includes a pattern of surface texture, and wherein said portion is along the optical path.
A method of making an apparatus for optical beam shaping and diffusing, comprising the steps of:
A method of using an apparatus for optical beam shaping and diffusing, comprising:
Dependencies are inferred from the claim text.