Illuminating apparatus
AssigneeNikon Corporation
InventorsShigeru Hagiwara, Hiroyuki Hiraiwa, Takashi Mori
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Abstract
An illuminating apparatus is disclosed which comprises a light source, an optical system for condensing light emitted from the light source and illuminating an object with the condensed light, and an optical member which absorbs light having wavelengths from 260 to 340 nm among the light emitted from the light source, wherein the optical member is made of glass or crystalline material to which metal is doped.
Claims13
An illuminating apparatus comprising:
- a light source;
- an optical system disposed in an optical path of a light emitted from said light source to condense the light emitted from the light source and illuminate an object with the condensed light;
- and
- an optical member disposed in said optical path, and exhibiting an absorbing property for light having wavelength from 260 to 340 nm among the light emitted from the light source, to suppress formation of ammonium sulfate that would otherwise form in the absence of said optical member,
- wherein said optical member is made of glass or crystalline material doped with an impurity that has said absorbing property.
An illuminating apparatus comprising:
- a light source;
- an optical system for condensing light emitted from the light source and illuminating an object with condensed light;
- and
- an optical member in which fluid absorbing light having wavelength from 260 to 340 nm among the light emitted from the light source is filled.
An exposure apparatus for transferring a pattern formed on a mask onto a substrate with a light emitted from a light source, comprising:
- an illumination optical system disposed between said light source and said mask, and which illuminates said mask with the light emitted from the light source;
- and
- an optical member disposed in said optical path, and exhibiting an absorbing property for light having wavelength from 260 to 340 nm among the light emitted from the light source, to suppress formation of ammonium sulfate that would otherwise form in the absence of said optical member,
- wherein said optical member is made of glass or crystalline material doped with an impurity that has said absorbing property.
Dependencies are inferred from the claim text.