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OwnerIsaku Kanno, Keiichiro Yamanaka +3inventors
InventorsIsaku Kanno, Keiichiro Yamanaka, Takeshi Kamada, Hiroyoshi Yajima, Shintaro Hara
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A piezoelectric film and a second electrode and vibration plate are formed on one surface of a deposition substrate that transmits ultraviolet rays therethrough. A transfer substrate is attached to the second electrode and vibration plate. The other surface of the deposition substrate is irradiated with ultraviolet rays. The deposition substrate and the piezoelectric film are separated from each other by the energy of the ultraviolet rays, thus transferring the piezoelectric film and the second electrode and vibration plate onto the transfer substrate.
A method for manufacturing a piezoelectric element, comprising the steps of:
The method for manufacturing a piezoelectric element of claim 8, wherein the ultraviolet absorbing film is an oxide film made of an oxide having a perovskite structure or a titanium oxide.
A piezoelectric element, obtained by:
Dependencies are inferred from the claim text.