System for validating and monitoring semiconductor testing tools
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShun-An Chen, Li-Chung Lin, Yao-Tung Liu, Yung-Min Cheng, Ming-Hui Lin, Hsin-Hom Chen, Chun-Sheng Wang
Life of this patent
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Abstract
A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
Claims21
A system for monitoring semiconductor testing tools comprising:
- a tester testing a semiconductor device, whereby a test result is derived;
- a storage device storing a logic function corresponding to the semiconductor device;
- and
- a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
A system for validating semiconductor test tools using a semiconductor device which a first test result has been derived from and validated, the system comprising:
- a tester testing the semiconductor device, whereby a second test result is derived;
- a storage device storing the first test result of the semiconductor device;
- and
- a processor receiving the first and second test result from the storage device and tester respectively, and comparing the first and second test result for validation of the second test result.
Dependencies are inferred from the claim text.