Micromirror driver and method of controlling micromirror driver

A micromirror driver comprising:

• a micromirror having at least one groove and comprising a base electrode formed at the at least one groove;
• an elastic body which supports the micromirror in rotation;
• and
• at least two electrodes which electrostatically interact with the base electrode to rotate the micromirror, wherein one of the at least two electrodes operates independently of another of the at least two electrodes.

A method of controlling a micromirror driver, which comprises a micromirror, an elastic body supporting the micromirror in rotation, and at least one electrode, the method comprising:

• generating electrostatic forces between the micromirror and the at least one electrode by applying a voltage V to the at least one electrode;
• setting the voltage V to satisfy an equation, V2=V0+αθ where:
• V0 represents an initial voltage of the at least one electrode,
• α represents an arbitrary coefficient, and
• θ represents a rotation angle of the micromirror;
• and
• controlling a frequency and/or an amplitude of the micromirror by varying the initial voltage V0 of the at least one electrode and the arbitrary coefficient α.

A micromirror driver comprising:

• a micromirror having an outer edge and a rotation axis, the micromirror comprising:
• a base electrode having a first portion formed along the outer edge of the micromirror, and a second portion formed between the outer edge of the micromirror and the rotation axis;
• an elastic body which supports the micromirror for rotation about the rotation axis;
• and
• first and second driver electrodes which electrostatically interact with the first and second portions of the base electrode, respectively, in response to an applied voltage.

A method of controlling a micromirror which is suspended for rotation about an axis by an elastic body, the micromirror having a base electrode, a first portion of the base electrode formed along an edge of the micromirror and a second portion of the base electrode formed between the first portion of the base electrode and the rotation axis, and the micromirror driver having first and second driver electrodes disposed near the first and second portions of the base electrode, respectively, the method comprising:

• applying a voltage (V1) to the first driver electrode wherein V1 satisfies an equation, V12=V0, to control an amplitude of the micromirror;
• and
• applying a voltage (V2) to the second driver electrode wherein V2 satisfies an equation, V22=αθ, and adjusting a to control a frequency of the micromirror, wherein:
• V0 represents an initial voltage at the electrodes, and
• θ represents a rotation angle of the micromirror.

A micromirror driver, comprising:

• a micromirror having an outer edge and a rotation axis, the micromirror comprising:
• a base electrode having a first portion formed along the outer edge of the micromirror and a second portion formed between the outer edge of the micromirror and the rotation axis;
• an elastic body which supports the micromirror for rotation about the rotation axis;
• and
• first and second driver electrodes which electrostatically interact with the first and second portions of the base electrode, respectively, in response to first and second applied voltages, respectively, wherein:
• the first voltage controls an amplitude of the micromirror;
• and
• the second voltage controls a resonant frequency of the micromirror.