Method of manufacturing rare earth thick film magnet, motor and actuator comprising rare earth thick film magnet manufactured by the manufacturing method, and method of manufacturing same

Abstract

The method of manufacturing rare earth thick film magnet comprising a step of forming an alloy layer of 30-100 μm thick having a general formula RXBYTMZ on a substrate by a physical deposition process, and a step of heat-treating the alloy layer to form a thick film magnetic layer having R2TM14B phase as a main phase. In the general formula, R is at least one of rare earth elements, B is boron, TM is iron or its alloy partly substituted by cobalt. X is 0.1-0.2, Y is 0.05-0.2 and Z=1−X−Y. Further, the method of the present invention includes a step of laminating a plurality of alloy layers formed on a substrate together with the substrate. A motor comprising rare earth thick film magnet of the present invention is extremely small while obtaining high output.

Dependencies are inferred from the claim text.