Photoelectric converter and fabrication method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHongyong Zhang, Masayuki Sakakura
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Abstract
There is provided a laminated type photoelectric converter whose sensitivity is enhanced uniformly. In the photoelectric converter in which a photoelectric conversion device is laminated above a signal transfer device, the sensitivity is enhanced by providing bends on a lower electrode of the photoelectric conversion device and by confining light uniformly.
Claims20
A laminated type photoelectric converter in which a photoelectric conversion device is laminated above a signal transfer device, wherein an organic resin film is provided above said signal transfer device, said photoelectric conversion device is provided above said organic resin film and a lower electrode of said photoelectric conversion device has bends.
A laminated type photoelectric converter in which a photoelectric conversion device is laminated above a signal transfer device, wherein an organic resin film is provided above said signal transfer device, said photoelectric conversion device is provided above said organic resin film, micro lenses are provided above an upper electrode of said photoelectric conversion device and a lower electrode of said photoelectric conversion device has a bend.
A method for fabricating a photoelectric converter in which a photoelectric conversion device is laminated above a signal transfer device, comprising steps of:
- forming said signal transfer device on a substrate;
- forming a flattening film made of organic resin above said signal transfer device;
- forming a resist on said flattening film;
- creating a bend on said resist;
- etching said flattening film almost in the same shape with said bend;
- forming a lower electrode of said photoelectric conversion device;
- and
- forming a photoelectric conversion layer and an upper electrode above said lower electrode.
A method for fabricating a photoelectric converter in which a photoelectric conversion device is laminated above a signal transfer device, comprising steps of:
- forming said signal transfer device on a substrate;
- forming a flattening film made of organic resin above said signal transfer device;
- forming a resist on said flattening film;
- creating a bend on said resist;
- etching said flattening film almost in the same shape with said bend;
- forming a lower electrode of said photoelectric conversion device;
- forming a photoelectric conversion layer and an upper electrode above said lower electrode;
- and
- forming micro lenses above said upper electrode.
Dependencies are inferred from the claim text.