Formation of an optical component having smooth sidewalls
OwnerYiqiong Wanginventor
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Abstract
The invention relates to a method of forming an optical component having a light transmitting medium positioned over a base. The method includes forming a mask over the light transmitting medium. The mask is formed so as to protect a region of the light transmitting region where a waveguide is to be formed. The method also includes applying an etching medium to the light transmitting medium so as to form one or more surfaces of the waveguide. The etching medium includes a fluorine containing gas and one or more partial passivants. In some instances, the etching medium excludes oxygen.
Claims39
A method of forming an optical component, comprising:
- forming a mask over a light transmitting medium so as to protect a region of the light transmitting region where a waveguide is to be formed;
- and
- applying an etching medium to the light transmitting medium so as to form one or more surfaces of the waveguide, the etching medium including a fluorine containing gas and one or more partial passivants.
A method of forming an optical component, comprising:
- obtaining an optical component having a light transmitting medium positioned over a base;
- and
- applying an etching medium to the light transmitting medium so as to form at least one surface of a waveguide in the light transmitting medium, the etching medium including a fluorine containing gas and one or more partial passivants.
Dependencies are inferred from the claim text.