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US 2002/0158045 A1Published application
Formation of an optical component having smooth sidewalls
OwnerYiqiong Wanginventor
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Abstract
A method of forming an optical component having a light transmitting medium positioned over a base is disclosed. The method includes forming a mask over the light transmitting medium. The mask is formed so as to protect a region of the light transmitting region where a waveguide is to be formed. The method also includes applying an etching medium to the light transmitting medium so as to form one or more surfaces of the waveguide. The etching medium includes a fluorine-containing gas, one or more partial passivants and Oxygen.
Claims34
A method of forming an optical component, comprising:
- forming a mask over a light transmitting medium so as to protect a region of the light transmitting region where a waveguide is to be formed;
- and
- applying an etching medium to the light transmitting medium so as to form one or more surfaces of the waveguide, the etching medium including a fluorine-containing gas, one or more partial passivants and Oxygen.
A method of forming an optical component, comprising:
- obtaining an optical component having a light transmitting medium positioned over a base;
- and
- applying an etching medium to the light transmitting medium so as to form at least one surface of a waveguide in the light transmitting medium, the etching medium including a fluorine-containing gas, one or more partial passivants and Oxygen.
Dependencies are inferred from the claim text.