Apparatus and method for contacting a conductive layer

A method of forming an electrostatic discharge device contact comprising the steps of:

• forming a pad on a substrate;
• depositing a composite insulating layer between and over conductive plates and the pad, wherein the insulating layer isolates the conductive plates and pad and protects them from damage, and wherein the insulating layer comprises a dielectric region underlying a conductive layer;
• forming a passivation layer over at least a portion of the conductive layer;
• patterning a photoresist over at least a portion of the passivation and the conductive layer;
• etching an opening through the passivation, the conductive and the insulating layer, wherein the photoresist and the conductive layer serve as masks;
• and
• depositing a conductive material in the opening to form an electrical contact between the pad and the conductive layer.

An integrated circuit sensor mask for making a contact between layers in an integrated circuit comprising:

• a substrate having disposed thereon a sensor and an electrically conductive pad;
• an insulating layer disposed over the sensor to electrically isolate the sensor;
• a conductive layer disposed over the insulating layer at the pad;
• and
• a passivation layer disposed over the conductive layer, wherein the conductive layer serves as a mask during an etching step that forms an opening in the passivation and insulating layer, thereby exposing the conductive layer and the pad.