Metal containing waste water treatment method and metal containing waste water treatment equipment

Metal containing waste water treatment equipment comprising:

• a submerged membrane separation tank in which a reaction section, a submerged membrane section that has a submerged membrane and a precipitation section are arranged in order from top to bottom and into which a metal containing waste water is introduced from above, whereby
• a pH adjuster is added to the reaction section so as to cause a reaction with the metal containing waste water,
• the metal containing waste water is separated into water and metal in the submerged membrane section, and
• the separated metal is precipitated and concentrated in the precipitation section.

Metal containing waste water treatment equipment comprising:

• a first submerged membrane separation tank in which a first reaction section, a first submerged membrane section that has a first submerged membrane and a first precipitation section are arranged in order from top to bottom and into which a metal containing waste water is introduced from above;
• and
• a second submerged membrane separation tank in which a second reaction section, a second submerged membrane section that has a second submerged membrane and a second precipitation section are arranged in order from top to bottom and into which a treated water from the first submerged membrane section of the first submerged membrane separation tank is introduced from above, whereby
• the first submerged membrane separation tank serves to add a pH adjuster to the first reaction section so as to cause a reaction with the metal containing waste water, subsequently separate water and metal from the metal containing waste water by the first submerged membrane of the first submerged membrane section and subsequently precipitate and concentrate the metal in the first precipitation section located in a lowermost portion, and
• the second submerged membrane separation tank serves to add a coagulant and a pH adjuster to the second reaction section so as to cause a reaction, subsequently separate water and metal by the second submerged membrane of the second submerged membrane section and subsequently precipitate and concentrate the metal in the second precipitation section located in a lowermost portion.

Metal containing waste water treatment equipment comprising:

• a first submerged membrane separation tank in which a first reaction section, a first submerged membrane section that has a first submerged membrane and a first precipitation section are arranged in order from top to bottom and into which a metal containing waste water is introduced from above, the first submerged membrane separation tank serving to add a pH adjuster to the first reaction section so as to cause a reaction with the metal containing waste water, subsequently separate water and metal from the metal containing waste water by the first submerged membrane of the first submerged membrane section and subsequently precipitate and concentrate the metal in the first precipitation section located in a lowermost portion;
• a second submerged membrane separation tank in which a second reaction section, a second submerged membrane section that has a second submerged membrane and a second precipitation section are arranged in order from top to bottom and into which a treated water from the first submerged membrane of the first submerged membrane separation tank is introduced from above, the second submerged membrane separation tank serving to add a coagulant and a pH adjuster to the second reaction section so as to cause a reaction, subsequently separate water and metal by the second submerged membrane of the second submerged membrane section and subsequently precipitate and concentrate the metal in the second precipitation section located in a lowermost portion;
• and
• a third submerged membrane separation tank that has a third submerged membrane.

A metal containing waste water treatment method for collecting metal from a metal containing waste water, comprising the steps of:

• separating a first metalhydroxide from the waste water by making the metal containing waste water pass through a first submerged membrane separation unit with a pH adjuster added;
• separating a concentrate brine that contains another metal dissolved in the waste water from the waste water by making the waste water pass through a reverse osmosis membrane separation unit;
• and
• sending the concentrate brine that contains said another metal back to the first submerged membrane separation unit and adding the concentrate brine to the waste water together with the pH adjuster.

A metal containing waste water treatment method comprising the steps of:

• introducing a metal containing compound semiconductor waste water from above into a first submerged membrane separation tank in which a reaction section, a submerged membrane section that has a submerged membrane and a precipitation section are arranged in order from top to bottom and adding a pH adjuster to the reaction section so as to cause a reaction;
• subsequently separating metal from the waste water by the submerged membrane of the submerged membrane section and subsequently precipitating and concentrating the metal in the precipitation section;
• treating a treated water obtained by the submerged membrane sequentially in an arsenic- and phosphorus-removing unit, an activated carbon adsorption unit, a reverse osmosis membrane unit and an electric deionization unit and thereafter introducing the resulting liquid into an ultrapure water generating system;
• and
• sending a concentrate brine from the reverse osmosis membrane separation unit and the electric deionization unit back to the reaction section.

A metal containing waste water treatment method for collecting metal from a metal containing waste water, comprising the steps of:

• preliminarily adding a pH adjuster to the waste water so as to cause a reaction;
• making the resulting waste water pass through a multistage type submerged membrane separation unit including submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section arranged below the submerged membranes for precipitating a reactant by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes in order to separate a metalhydroxide from the waste water;
• separating a concentrate brine that contains another metal dissolved in the waste water from the waste water by making the treated water, from which the metalhydroxide has been removed, pass through a reverse osmosis membrane separation unit;
• and
• sending the concentrate brine that contains said another metal back to a stage before the multistage type submerged membrane separation unit and adding the concentrate brine to the waste water together with the pH adjuster.

A metal containing waste water treatment method comprising the steps of:

• adding a pH adjuster to a waste water from compound semiconductor plant in a pH adjustment tank so as to cause a reaction;
• introducing the waste water from the pH adjustment tank upwardly in an upward flow into a multistage submerged membrane separation tank in which an upper portion where a pH meter is placed, a submerged membrane section that includes submerged membranes arranged vertically in a plurality of tiers and a diaphragm for vibrating the submerged membranes and an adhesional precipitation section for making a reactant adhere to a filler are arranged in order from top to bottom;
• primarily separating a metal from the waste water by physically catching and filtering the metal in the waste water in the adhesional precipitation section and secondarily separating the metal from the waste water by the submerged membranes in the submerged membrane section;
• treating a treated water obtained by the submerged membranes sequentially in an arsenic- and phosphorus-removing unit, an activated carbon adsorption unit, a reverse osmosis membrane unit and an electric deionization unit and thereafter introducing the resulting liquid into an ultrapure water generating system;
• and
• sending a concentrate brine from the reverse osmosis membrane unit and the electric deionization unit back to the pH adjustment tank.

A metal containing waste water treatment method for collecting metal from a metal containing waste water, comprising the steps of:

• preliminarily adding a pH adjuster to a waste water in a first pH adjustment tank so as to cause a reaction, thereafter introducing the generated metalhydroxide into a foam separation tank, making bubbles generated in the waste water in the foam separation tank adhere to the metalhydroxide and making the metalhydroxide surface, thereby subjecting the metalhydroxide to foam separation;
• making a treated water obtained after the separation of the metalhydroxide pass through a multistage type submerged membrane separation unit that has submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section that is placed below the submerged membranes and precipitate a reactant obtained through the reaction by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes, thereby further separating the metalhydroxide from the treated water;
• separating a concentrate brine that contains another metal dissolved in the treated water from the treated water by making the treated water pass through a reverse osmosis membrane separation unit and sending the concentrate brine that contains said another metal back to the first pH adjustment tank;
• introducing the metalhydroxide separated in the foam separation tank and the multistage type submerged membrane separation unit into an evaporator and concentrating the metalhydroxide;
• and
• cooling steam evaporated from the evaporator to restore water and introducing the resulting water into a second pH adjustment tank in a stage before the reverse osmosis membrane separation unit.

A metal containing waste water treatment method, comprising steps of:

• introducing a compound semiconductor waste water that contains gallium arsenide, gallium phosphide and so on into a pH adjustment tank so as to cause a reaction with a pH adjuster added;
• thereafter introducing a waste water from the pH adjustment tank into a foam separation tank, making bubbles generated in the waste water in the foam separation tank adhere to a metalhydroxide obtained through the reaction so as to make the metalhydroxide surface, thereby subjecting the metalhydroxide to foam separation;
• introducing a treated water obtained after the separation of the metalhydroxide upwardly in an upward flow into a multistage type submerged membrane separation tank in which an upper portion where a pH meter is placed, a submerged membrane section that includes submerged membranes arranged vertically in a plurality of tiers and a diaphragm for vibrating the submerged membrane and an adhesional precipitation section for precipitating a reactant obtained through the reaction by making the reactant adhere to a filler are arranged in order from top to bottom;
• primarily separating a metal from the treated water by physically catching and filtering the metal in the treated water in the adhesional precipitation section;
• secondarily separating a metalhydroxide from the treated water by the submerged membranes of the submerged membrane section, treating the treated water obtained by the submerged membranes sequentially in an arsenic- and phosphorus-removing unit, an activated carbon absorption unit, a reverse osmosis membrane unit and an electric deionization unit, thereafter introducing the resulting liquid into an ultraviolet sterilizer, a cartridge polisher and an ultrafilter unit to produce an ultrapure water and supply the ultrapure water to each production unit and introducing a waste water from each production unit into the pH adjustment tank;
• sending and introducing a concentrate brine from the activated carbon absorption unit, the reverse osmosis membrane unit, the electric deionization unit and the ultrafilter unit back into the pH adjustment tank;
• and
• concentrating the metalhydroxide concentrated in the foam separation tank and the multistage type submerged membrane separation unit by introducing the metalhydroxide into an evaporator, cooling steam evaporated from the evaporator to restore water, making the water join the water separated in the multistage type submerged membrane separation tank and introducing the resulting liquid into the arsenic- and phosphorus-removing unit.

A metal containing waste water treatment method comprising the steps of:

• causing a reaction of metal and water contained in a waste water from compound semiconductor plant that contains gallium arsenide with a pH adjuster added in a pH adjustment tank, making bubbles generated in a waste water adhere to a metalhydroxide generated through the reaction in a foam separation tank so as to make the metalhydroxide surface in the waste water, thereby subjecting the metalhydroxide to foam separation;
• and
• making the treated water that has passed through the foam separation tank pass from below through a multistage type submerged membrane separation tank, which has submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section that is placed below the submerged membranes and precipitates a reactant caused by the reaction by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes, thereby further separating the metalhydroxide from the treated water,
• whereby the waste water is subjected to a physical treatment, a biological treatment and a chemical treatment, and
• the resulting liquid is thereafter treated in an evaporator so as to separate the liquid into gallium, other metals and water and separately collect the substances, thereby establishing a completely closed treatment system.

A metal containing waste water treatment method comprising the steps of:

• causing a reaction of metal and water contained in a waste water from compound semiconductor plant that contains gallium arsenide with a pH adjuster added in a pH adjustment tank, making bubbles generated in a waste water adhere to a metalhydroxide generated through the reaction in a foam separation tank so as to make the metalhydroxide surface in the waste water, thereby subjecting the metalhydroxide to foam separation;
• and
• making the treated water that has passed through the foam separation tank pass from below through a multistage type submerged membrane separation tank, which has submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section that is placed below the submerged membranes and precipitates a reactant caused by the reaction by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes, thereby further separating the metalhydroxide from the treated water,
• whereby the waste water is subjected to a physical treatment, a biological treatment and a chemical treatment, and
• the resulting liquid is thereafter treated in an evaporator so as to separate the liquid into gallium, other metals and water and separately collect the substances, collecting the metals as valuable substances and collecting the water as a raw water for an ultrapure water generating system, thereby establishing a completely closed treatment system.

A metal containing waste water treatment method comprising the steps of:

• causing a reaction of gallium, arsenic, phosphorus and water in a waste water of gallium arsenide and gallium phosphide with a pH adjuster added in a pH adjustment tank, making bubbles generated in a waste water adhere to a metalhydroxide generated through the reaction in a foam separation tank so as to make the metalhydroxide surface in the waste water, thereby subjecting the metalhydroxide to foam separation;
• and
• making the treated water that has passed through the foam separation tank pass from below through a multistage type submerged membrane separation tank, which has submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section that is placed below the submerged membranes and precipitates a reactant caused by the reaction by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes, thereby further separating the metalhydroxide from the treated water,
• whereby the waste water is subjected to a physical treatment, a biological treatment and a chemical treatment, and
• the resulting liquid is thereafter treated in an evaporator so as to separately collect gallium, a mixture of arsenic and phosphorus and water, thereby establishing a completely closed treatment system.

A metal containing waste water treatment method comprising the steps of:

• causing a reaction of gallium, arsenic, phosphorus and water in a waste water of gallium arsenide and gallium phosphide with a pH adjuster added in a pH adjustment tank, making bubbles generated in a waste water adhere to a metalhydroxide generated through the reaction in a foam separation tank so as to make the metalhydroxide surface in the waste water, thereby subjecting the metalhydroxide to foam separation;
• and
• making the treated water that has passed through the foam separation tank pass from below through a multistage type submerged membrane separation tank, which has submerged membranes arranged vertically in a plurality of tiers, an adhesional precipitation section that is placed below the submerged membranes and precipitates a reactant caused by the reaction by making the reactant adhere to a filler and a diaphragm for vibrating the submerged membranes, thereby further separating the metalhydroxide from the treated water,
• whereby the waste water is subjected to a physical treatment, a biological treatment and a chemical treatment, and
• the resulting liquid is thereafter treated in an evaporator so as to separately collect gallium, a mixture of arsenic and phosphorus and water, collecting the gallium and the mixture of arsenic and phosphorus as valuable substances and collecting the water as a raw water for an ultrapure water generating system, thereby establishing a completely closed treatment system.