Sensor with built-in circuits and pressure detector using the same

A sensor with built-in circuits comprising:

• a sensor region provided on a semiconductor substrate and having a diaphragm portion;
• a circuit region provided on said semiconductor substrate so as to be adjacent to said sensor region;
• a wiring conductor extending from said circuit region to within said sensor region and between a side of said diaphragm portion and said circuit region;
• and
• a passivation film formed to cover said circuit region and said wiring conductor.

A sensor with built-in circuits comprising:

• a sensor region provided on a semiconductor substrate and having a diaphragm portion;
• and
• a circuit region provided on said semiconductor substrate so as to be adjacent to said sensor region, wherein
• said semiconductor substrate has a first region of a first-conductivity type and a second region of a second-conductivity type, said sensor region is provided in said first region, and said circuit region is provided in said second region.

A pressure detector comprising:

• a sensor with built-in circuits having a sensor region provided on a semiconductor substrate and including a diaphragm portion, and a circuit region provided on said semiconductor substrate so as to be adjacent to said sensor region, wherein a passivation film is formed to cover said circuit region and an edge of said passivation film is located within said sensor region and between a side of said diaphragm portion and said circuit region, and said diaphragm and circuit elements within said circuit region are located on the same surface side of said semiconductor substrate;
• a package housing said sensor and having a pressure introducing hole located on said surface side;
• and
• a gel material provided within said package to cover said sensor.