Method and apparatus for performing atomic force microscopy measurements
AssigneeInteruniversitair Microelektronica Centrum (IMEC)
InventorsWilfried Vandervorst, Pierre Eyben
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Abstract
The present invention is related to a method and apparatus for performing Atomic Force Microscopy. In the method of the invention, a force profile is defined, and a sample is scanned by the AFM probe in such a way that the force between the sample and the probe is changed according to said predefined profile. The invention is equally related to an apparatus with which to perform said method.
Claims24
A method of performing an atomic force microscopy (AFM) measurement, using an AFM microscope equipped with a probe, the method comprising:
- defining a force profile, which is a force change as a function of time, wherein the minimum force is larger than zero;
- and
- performing the AFM measurement on a sample, by scanning at least one line over the sample, wherein a force being exerted on the sample by the AFM probe is changed according to the force profile, during the movement of the probe in one direction along the line.
An apparatus for performing an atomic force microscopy measurement, comprising:
- an atomic force microscope (AFM);
- an amplifier;
- an input/output device;
- and
- a controller device;
- wherein the input/output device is configured to receive at least one of a force profile and a speed profile, and to transfer the at least one of the profiles to the controller device;
- and wherein the controller device is configured to transmit the at least one of the profiles to the AFM;
- and wherein the apparatus is configured to perform a multiplexing/demultiplexing operation on measurement signals coming from the AFM;
- and wherein the amplifier amplifies the measured signals before performing the multiplexing/demultiplexing operation and transmitting the measured signals to the controller device.
An apparatus for performing an atomic force microscopy measurement, comprising:
- an atomic force microscope (AFM) having a probe with a tip, the AFM configured to perform an atomic force microscopy measurement on a sample;
- and
- a controller configured to receive a force profile which is a force change as a function of time, and to control the AFM such that a force being exerted on the sample by the probe tip is changed based on the force profile during scan of at least one line on the sample.
A method of performing an atomic force microscopy measurement, comprising:
- providing an atomic force microscope (AFM) including a probe with a tip;
- defining a force profile, which is a force change as a function of time;
- scanning at least one line over a sample using the prove tip;
- and
- changing a force being exerted on the sample by the probe tip based on the force profile during the scanning.
An apparatus for performing an atomic force microscopy (AFM) measurement, using an AFM microscope equipped with a probe, the apparatus comprising:
- means for defining a force profile, which is a force change as a function of time, wherein the minimum force is larger than zero;
- and
- means for performing the AFM measurement on a sample, by scanning at least one line over the sample, wherein a force being exerted on the sample by the AFM probe is changed according to the force profile, during the movement of the probe in one direction along the line.
An apparatus for performing an atomic force microscopy measurement, comprising:
- means for providing an atomic force microscope (AFM) including a probe with a tip;
- means for defining a force profile, which is a force change as a function of time;
- means for scanning at least one line over a sample using the prove tip;
- and
- means for changing a force being exerted on the sample by the probe tip based on the force profile during the scanning.
Dependencies are inferred from the claim text.