Magnetic assist read track-width definition for a lead overlay top spin-valve GMR head
AssigneeHeadway Technologies, Inc.
InventorsCharles C. Lin, Cheng T. Horng, Min Li, Kochan Ju
Life of this patent
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Abstract
A method for forming a top spin-valve SyAP GMR read sensor having a novel conductive lead overlay configuration and the sensor so formed. The lead overlay electrically contacts the sensor at a position within the SyAP pinned layer, thus simultaneously assuring improved electrical contact and destroying the GMR properties of the sensor at the junction to improve the definition of the sensor track width.
Claims38
A method of fabricating a top spin-valve giant magnetoresistive (GMR) read head with a novel conductive lead overlay configuration, comprising:
- providing a substrate and a dielectric layer formed thereupon;
- forming on the dielectric a first seed layer;
- forming on the seed layer a ferromagnetic free layer;
- forming on the ferromagnetic free layer a metallic, non-magnetic spacer layer;
- forming on the spacer layer a synthetic antiferromagnetic pinned layer (SyAP), said formation further comprising the steps of:
- forming a first ferromagnetic layer, AP1;
- forming on said first ferromagnetic layer a metallic, non-magnetic coupling layer;
- forming on the metallic, non-magnetic coupling layer a second ferromagnetic layer, AP2;
- forming on said SyAP layer an antiferromagnetic pinning layer;
- forming on the antiferromagnetic pinning layer a first capping layer, completing, thereby, a GMR top spin-valve SyAP sensor stack formation;
- etching away a portion of the sensor stack formation to form, laterally disposed on either side of said sensor stack formation, contiguous junction surfaces for the formation of a longitudinal magnetic bias layer;
- forming said magnetic bias layer contiguously with said junction surfaces;
- forming on said magnetic bias layer a second capping layer, which will also serve as a first ion-beam etching mask;
- forming symmetrically over a central portion of said sensor stack formation a single structure which will serve as both a second ion-beam etching mask and a lift-off stencil, the width of said structure corresponding approximately to a desired track-width of the read head;
- ion-beam etching a region between said first ion-beam etching mask and said second ion-beam etching mask, said etching process removing a thickness of said sensor stack formation extending vertically downward from the first capping layer to a position approximately between said AP2 layer and said metallic, non-magnetic spacer layer formed on said ferromagnetic free layer;
- forming, now using said second ion-beam etching mask as a lift-off stencil, a conducting lead layer overlaying said ion-beam etched region and said longitudinal magnetic bias layer;
- removing said second ion-beam etching mask and lift-off stencil.
A top spin-valve giant magnetoresistive (GMR) SyAP read head having a novel conductive lead overlay configuration, comprising:
- a substrate on which is formed a dielectric layer;
- a seed layer formed on said dielectric layer;
- a ferromagnetic free layer forming on the seed layer;
- a metallic, non-magnetic spacer layer formed on the ferromagnetic free layer;
- a synthetic antiferromagnetic pinned layer (SyAP) formed on the spacer layer, said layer further comprising:
- a first ferromagnetic layer, AP1;
- a metallic, non-magnetic coupling layer formed on said first ferromagnetic layer;
- a second ferromagnetic layer, AP2, formed on the metallic, non-magnetic coupling layer;
- an antiferromagnetic pinning layer formed on said SyAP layer;
- a first capping layer formed on said antiferromagnetic pinning layer;
- a longitudinal hard magnetic bias layer formed as a contiguous junction against a first side portion of said sensor element;
- a conducting lead layer, formed overlaying said longitudinal hard magnetic bias layer and electrically contacting a second side portion of said sensor element.
Dependencies are inferred from the claim text.